Highly efficient electron gun with a single-atom electron source

Tsuyoshi Ishikawa, Tomohiro Urata, Boklae Cho, Eiji Rokuta, Chuhei Oshima, Yoshinori Terui, Hidekazu Saito, Akira Yonezawa, Tien T. Tsong

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)

Abstract

The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a ZrOW Schottky gun. At the pressure of less than 1× 10-9 Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.

Original languageEnglish
Article number143120
JournalApplied Physics Letters
Volume90
Issue number14
DOIs
Publication statusPublished - 2007

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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