Highly efficient electron gun with a single-atom electron source

Tsuyoshi Ishikawa, Tomohiro Urata, Boklae Cho, Eiji Rokuta, Chuhei Oshima, Yoshinori Terui, Hidekazu Saito, Akira Yonezawa, Tien T. Tsong

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Abstract

The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; ∼80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a ZrOW Schottky gun. At the pressure of less than 1× 10-9 Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.

Original languageEnglish
Article number143120
JournalApplied Physics Letters
Volume90
Issue number14
DOIs
Publication statusPublished - 2007

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Ishikawa, T., Urata, T., Cho, B., Rokuta, E., Oshima, C., Terui, Y., Saito, H., Yonezawa, A., & Tsong, T. T. (2007). Highly efficient electron gun with a single-atom electron source. Applied Physics Letters, 90(14), [143120]. https://doi.org/10.1063/1.2720348