Highly oriented c-axis 23° tilted ZnO films with high quasi-shear mode electromechanical coupling coefficients

Takuya Matsuo, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

A quasi-shear mode piezoelectric film with high electromechanical coupling coefficient k'15 is attractive for shear wave transducers, shear mode FBAR and SH-SAW devices. The single crystalline ideal ZnO film with c-axis-tilt angle of 28° from the surface normal of the film has high k'15 value of 0.38. In this study, we have investigated c-axis-tilted ZnO films to obtain sufficient tilt angle and good crystalline alignment using RF magnetron sputtering technique. We focused on the angle between the substrate surface and target surface during the sputtering deposition. In case that the film was deposited on the substrate set at 90° to the target surface, relatively large c-axis tilted angles of 22.6°-26.2° were obtained. Moreover, small ψ-scan FWHM values from 6.7° to 7.8° of the film indicated good crystalline alignment. Finally, k'15 value of this film was estimated as 0.26, which was the highest value ever reported for c-axis-tilted ZnO or AlN films.

Original languageEnglish
Title of host publication2007 IEEE Ultrasonics Symposium Proceedings, IUS
Pages1229-1232
Number of pages4
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2007 IEEE Ultrasonics Symposium, IUS
CountryUnited States
CityNew York, NY
Period07/10/2807/10/31

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Keywords

  • C-axis-tilted ZnO film
  • Quasi-shear electromechanical coupling coefficient
  • RF magnetron sputtering technique

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Matsuo, T., Yanagitani, T., Matsukawa, M., & Watanabe, Y. (2007). Highly oriented c-axis 23° tilted ZnO films with high quasi-shear mode electromechanical coupling coefficients. In 2007 IEEE Ultrasonics Symposium Proceedings, IUS (pp. 1229-1232). [4409882] (Proceedings - IEEE Ultrasonics Symposium). https://doi.org/10.1109/ULTSYM.2007.309