Abstract
A quasi-shear mode piezoelectric film with high electromechanical coupling coefficient k'15 is attractive for shear wave transducers, shear mode FBAR and SH-SAW devices. The single crystalline ideal ZnO film with c-axis-tilt angle of 28° from the surface normal of the film has high k'15 value of 0.38. In this study, we have investigated c-axis-tilted ZnO films to obtain sufficient tilt angle and good crystalline alignment using RF magnetron sputtering technique. We focused on the angle between the substrate surface and target surface during the sputtering deposition. In case that the film was deposited on the substrate set at 90° to the target surface, relatively large c-axis tilted angles of 22.6°-26.2° were obtained. Moreover, small ψ-scan FWHM values from 6.7° to 7.8° of the film indicated good crystalline alignment. Finally, k'15 value of this film was estimated as 0.26, which was the highest value ever reported for c-axis-tilted ZnO or AlN films.
| Original language | English |
|---|---|
| Title of host publication | Proceedings - IEEE Ultrasonics Symposium |
| Pages | 1229-1232 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2007 |
| Externally published | Yes |
| Event | 2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States Duration: 2007 Oct 28 → 2007 Oct 31 |
Other
| Other | 2007 IEEE Ultrasonics Symposium, IUS |
|---|---|
| Country | United States |
| City | New York, NY |
| Period | 07/10/28 → 07/10/31 |
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Keywords
- C-axis-tilted ZnO film
- Quasi-shear electromechanical coupling coefficient
- RF magnetron sputtering technique
ASJC Scopus subject areas
- Engineering(all)
Cite this
Highly oriented c-axis 23° tilted ZnO films with high quasi-shear mode electromechanical coupling coefficients. / Matsuo, Takuya; Yanagitani, Takahiko; Matsukawa, Mami; Watanabe, Yoshiaki.
Proceedings - IEEE Ultrasonics Symposium. 2007. p. 1229-1232 4409882.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Highly oriented c-axis 23° tilted ZnO films with high quasi-shear mode electromechanical coupling coefficients
AU - Matsuo, Takuya
AU - Yanagitani, Takahiko
AU - Matsukawa, Mami
AU - Watanabe, Yoshiaki
PY - 2007
Y1 - 2007
N2 - A quasi-shear mode piezoelectric film with high electromechanical coupling coefficient k'15 is attractive for shear wave transducers, shear mode FBAR and SH-SAW devices. The single crystalline ideal ZnO film with c-axis-tilt angle of 28° from the surface normal of the film has high k'15 value of 0.38. In this study, we have investigated c-axis-tilted ZnO films to obtain sufficient tilt angle and good crystalline alignment using RF magnetron sputtering technique. We focused on the angle between the substrate surface and target surface during the sputtering deposition. In case that the film was deposited on the substrate set at 90° to the target surface, relatively large c-axis tilted angles of 22.6°-26.2° were obtained. Moreover, small ψ-scan FWHM values from 6.7° to 7.8° of the film indicated good crystalline alignment. Finally, k'15 value of this film was estimated as 0.26, which was the highest value ever reported for c-axis-tilted ZnO or AlN films.
AB - A quasi-shear mode piezoelectric film with high electromechanical coupling coefficient k'15 is attractive for shear wave transducers, shear mode FBAR and SH-SAW devices. The single crystalline ideal ZnO film with c-axis-tilt angle of 28° from the surface normal of the film has high k'15 value of 0.38. In this study, we have investigated c-axis-tilted ZnO films to obtain sufficient tilt angle and good crystalline alignment using RF magnetron sputtering technique. We focused on the angle between the substrate surface and target surface during the sputtering deposition. In case that the film was deposited on the substrate set at 90° to the target surface, relatively large c-axis tilted angles of 22.6°-26.2° were obtained. Moreover, small ψ-scan FWHM values from 6.7° to 7.8° of the film indicated good crystalline alignment. Finally, k'15 value of this film was estimated as 0.26, which was the highest value ever reported for c-axis-tilted ZnO or AlN films.
KW - C-axis-tilted ZnO film
KW - Quasi-shear electromechanical coupling coefficient
KW - RF magnetron sputtering technique
UR - http://www.scopus.com/inward/record.url?scp=48149101090&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=48149101090&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2007.309
DO - 10.1109/ULTSYM.2007.309
M3 - Conference contribution
AN - SCOPUS:48149101090
SN - 1424413834
SN - 9781424413836
SP - 1229
EP - 1232
BT - Proceedings - IEEE Ultrasonics Symposium
ER -