HIGHLY STABLE SINGLE-CRYSTAL LaB6 CATHODE FOR CONVENTIONAL ELECTRON MICROPROBE INSTRUMENTS.

R. Shimizu, T. Shinike, Shingo Ichimura, S. Kawaii, T. Tanaka

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

The performance of single-crystal LaB//6 cathode was examined by measuring the brightness and current stability under the same conditions as for the conventional W hairpin cathode. The LaB//6 cathode was mounted in Vogel-type electron gun assembly of an electron probe microanalyser JAX-3 specifically modified for this purpose. The result shows that the present LaB//6 cathode provides not only high brightness of 2 multiplied by 10**5 A/cm**2 str. at 20 kV, but also high-current stability better than 1 multiplied by 10** minus **3 Ah** minus **1 in standard operation without any specific aid for current stabilization. Thus an order of magnitude increase in both the brightness and service lifetime can easily be obtained provided that the vacuum of the system is adequate, namely better than 1 multiplied by 10** minus **5 Torr (1. 33 multiplied by 10** minus **3 Pa). This substantial improvement of the present single-crystal LaB//6 cathode over the conventional W hairpin was also confirmed in a practical way by use in a commercial-type scanning Auger electron microscope, JAMP III.

Original languageEnglish
Pages (from-to)922-926
Number of pages5
JournalJ Vac Sci Technol
Volume15
Issue number3
DOIs
Publication statusPublished - 1978 Jan 1
Externally publishedYes

Fingerprint

Cathodes
Electrons
Luminance
Single crystals
Electron guns
Electron microscopes
Stabilization
Vacuum
Scanning

ASJC Scopus subject areas

  • Engineering(all)

Cite this

HIGHLY STABLE SINGLE-CRYSTAL LaB6 CATHODE FOR CONVENTIONAL ELECTRON MICROPROBE INSTRUMENTS. / Shimizu, R.; Shinike, T.; Ichimura, Shingo; Kawaii, S.; Tanaka, T.

In: J Vac Sci Technol, Vol. 15, No. 3, 01.01.1978, p. 922-926.

Research output: Contribution to journalArticle

Shimizu, R. ; Shinike, T. ; Ichimura, Shingo ; Kawaii, S. ; Tanaka, T. / HIGHLY STABLE SINGLE-CRYSTAL LaB6 CATHODE FOR CONVENTIONAL ELECTRON MICROPROBE INSTRUMENTS. In: J Vac Sci Technol. 1978 ; Vol. 15, No. 3. pp. 922-926.
@article{060b225207d842c198aebadde67a38c1,
title = "HIGHLY STABLE SINGLE-CRYSTAL LaB6 CATHODE FOR CONVENTIONAL ELECTRON MICROPROBE INSTRUMENTS.",
abstract = "The performance of single-crystal LaB//6 cathode was examined by measuring the brightness and current stability under the same conditions as for the conventional W hairpin cathode. The LaB//6 cathode was mounted in Vogel-type electron gun assembly of an electron probe microanalyser JAX-3 specifically modified for this purpose. The result shows that the present LaB//6 cathode provides not only high brightness of 2 multiplied by 10**5 A/cm**2 str. at 20 kV, but also high-current stability better than 1 multiplied by 10** minus **3 Ah** minus **1 in standard operation without any specific aid for current stabilization. Thus an order of magnitude increase in both the brightness and service lifetime can easily be obtained provided that the vacuum of the system is adequate, namely better than 1 multiplied by 10** minus **5 Torr (1. 33 multiplied by 10** minus **3 Pa). This substantial improvement of the present single-crystal LaB//6 cathode over the conventional W hairpin was also confirmed in a practical way by use in a commercial-type scanning Auger electron microscope, JAMP III.",
author = "R. Shimizu and T. Shinike and Shingo Ichimura and S. Kawaii and T. Tanaka",
year = "1978",
month = "1",
day = "1",
doi = "10.1116/1.569676",
language = "English",
volume = "15",
pages = "922--926",
journal = "Journal of Vacuum Science and Technology",
issn = "0022-5355",
publisher = "American Institute of Physics Publising LLC",
number = "3",

}

TY - JOUR

T1 - HIGHLY STABLE SINGLE-CRYSTAL LaB6 CATHODE FOR CONVENTIONAL ELECTRON MICROPROBE INSTRUMENTS.

AU - Shimizu, R.

AU - Shinike, T.

AU - Ichimura, Shingo

AU - Kawaii, S.

AU - Tanaka, T.

PY - 1978/1/1

Y1 - 1978/1/1

N2 - The performance of single-crystal LaB//6 cathode was examined by measuring the brightness and current stability under the same conditions as for the conventional W hairpin cathode. The LaB//6 cathode was mounted in Vogel-type electron gun assembly of an electron probe microanalyser JAX-3 specifically modified for this purpose. The result shows that the present LaB//6 cathode provides not only high brightness of 2 multiplied by 10**5 A/cm**2 str. at 20 kV, but also high-current stability better than 1 multiplied by 10** minus **3 Ah** minus **1 in standard operation without any specific aid for current stabilization. Thus an order of magnitude increase in both the brightness and service lifetime can easily be obtained provided that the vacuum of the system is adequate, namely better than 1 multiplied by 10** minus **5 Torr (1. 33 multiplied by 10** minus **3 Pa). This substantial improvement of the present single-crystal LaB//6 cathode over the conventional W hairpin was also confirmed in a practical way by use in a commercial-type scanning Auger electron microscope, JAMP III.

AB - The performance of single-crystal LaB//6 cathode was examined by measuring the brightness and current stability under the same conditions as for the conventional W hairpin cathode. The LaB//6 cathode was mounted in Vogel-type electron gun assembly of an electron probe microanalyser JAX-3 specifically modified for this purpose. The result shows that the present LaB//6 cathode provides not only high brightness of 2 multiplied by 10**5 A/cm**2 str. at 20 kV, but also high-current stability better than 1 multiplied by 10** minus **3 Ah** minus **1 in standard operation without any specific aid for current stabilization. Thus an order of magnitude increase in both the brightness and service lifetime can easily be obtained provided that the vacuum of the system is adequate, namely better than 1 multiplied by 10** minus **5 Torr (1. 33 multiplied by 10** minus **3 Pa). This substantial improvement of the present single-crystal LaB//6 cathode over the conventional W hairpin was also confirmed in a practical way by use in a commercial-type scanning Auger electron microscope, JAMP III.

UR - http://www.scopus.com/inward/record.url?scp=0017973385&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0017973385&partnerID=8YFLogxK

U2 - 10.1116/1.569676

DO - 10.1116/1.569676

M3 - Article

AN - SCOPUS:0017973385

VL - 15

SP - 922

EP - 926

JO - Journal of Vacuum Science and Technology

JF - Journal of Vacuum Science and Technology

SN - 0022-5355

IS - 3

ER -