Fingerprint
Dive into the research topics of 'High‐Rate Thermal Plasma CVD of SiC'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
High‐Rate Thermal Plasma CVD of SiC
Hideyuki Murakami, TOYONOBU YOSHIDA, KAZUO AKASHI
Research output: Contribution to journal › Article › peer-review
29
Citations
(Scopus)