Hydrogen plasma irradiation and postannealing effects on crystalline quality at vicinal Si (100) surface

Engineering & Materials Science

• Crystalline materials 91%
• Defects 36%
• Degradation 12%
• Diffraction 18%
• Electrons 17%
• Hydrogen 69%
• Ions 80%
• Irradiation 89%
• Plasmas 80%
• Point defects 27%
• Reflection high energy electron diffraction 36%
• Thermodynamic stability 18%

Physics & Astronomy

• causes 8%
• defects 24%
• degradation 10%
• diffraction 7%
• electron diffraction 12%
• electrons 6%
• high energy electrons 14%
• hydrogen ions 33%
• hydrogen plasma 100%
• ions 20%
• irradiation 56%
• point defects 13%
• thermal stability 12%
• wafers 10%

Chemical Compounds

• Crystal Point Defect 22%
• Electron Particle 9%
• Hydrogen 44%
• Ion 34%
• Plasma 54%
• Reflection High Energy Electron Diffraction 28%
• Surface 27%
• Thermal Stability 11%