Hyperthermal O3 beam produced by laser ablation of solid-ozone film

Tetsuya Nishiguchi, Yoshiki Morikawa, Masaharu Miyamoto, Hidehiko Nonaka, Shingo Ichimura

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Abstract

In order to obtain a highly concentrated hyperthermal ozone beam for more effective Si oxidation, we performed laser ablation of solid-ozone. A KrF pulse laser was irradiated onto solidified ozone on a sapphire substrate cooled to 30 to 60 K using a cryocooler. A mixture of ozone, molecular oxygen and atomic oxygen was detected using a time-of-flight method through a quadrupole mass filter. The velocity distribution of ablated ozone molecules was almost the same as the distribution at thermal equilibrium. An ozone beam with a fitted temperature of 2500 K and maximum translational energy of 3 eV was obtained under optimum laser conditions.

Original languageEnglish
Pages (from-to)L1200-L1202
JournalJapanese journal of applied physics
Volume39
Issue number11 B
Publication statusPublished - 2000 Nov 15

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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    Nishiguchi, T., Morikawa, Y., Miyamoto, M., Nonaka, H., & Ichimura, S. (2000). Hyperthermal O3 beam produced by laser ablation of solid-ozone film. Japanese journal of applied physics, 39(11 B), L1200-L1202.