Hyperthermal O3 beam produced by laser ablation of solid-ozone film

Tetsuya Nishiguchi, Yoshiki Morikawa, Masaharu Miyamoto, Hidehiko Nonaka, Shingo Ichimura

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

In order to obtain a highly concentrated hyperthermal ozone beam for more effective Si oxidation, we performed laser ablation of solid-ozone. A KrF pulse laser was irradiated onto solidified ozone on a sapphire substrate cooled to 30 to 60 K using a cryocooler. A mixture of ozone, molecular oxygen and atomic oxygen was detected using a time-of-flight method through a quadrupole mass filter. The velocity distribution of ablated ozone molecules was almost the same as the distribution at thermal equilibrium. An ozone beam with a fitted temperature of 2500 K and maximum translational energy of 3 eV was obtained under optimum laser conditions.

Original languageEnglish
JournalJapanese Journal of Applied Physics
Volume39
Issue number11 B
Publication statusPublished - 2000 Nov 15
Externally publishedYes

Fingerprint

Laser ablation
Ozone
laser ablation
ozone
fluid filters
Molecular oxygen
oxygen
Velocity distribution
Sapphire
lasers
Laser pulses
sapphire
velocity distribution
quadrupoles
Oxidation
oxidation
Molecules
Oxygen
Lasers
Substrates

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Hyperthermal O3 beam produced by laser ablation of solid-ozone film. / Nishiguchi, Tetsuya; Morikawa, Yoshiki; Miyamoto, Masaharu; Nonaka, Hidehiko; Ichimura, Shingo.

In: Japanese Journal of Applied Physics, Vol. 39, No. 11 B, 15.11.2000.

Research output: Contribution to journalArticle

Nishiguchi, T, Morikawa, Y, Miyamoto, M, Nonaka, H & Ichimura, S 2000, 'Hyperthermal O3 beam produced by laser ablation of solid-ozone film', Japanese Journal of Applied Physics, vol. 39, no. 11 B.
Nishiguchi, Tetsuya ; Morikawa, Yoshiki ; Miyamoto, Masaharu ; Nonaka, Hidehiko ; Ichimura, Shingo. / Hyperthermal O3 beam produced by laser ablation of solid-ozone film. In: Japanese Journal of Applied Physics. 2000 ; Vol. 39, No. 11 B.
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