III-V/Si integration technology for laser diodes and Mach-Zehnder modulators

Tatsurou Hiraki, Takuma Aihara, Koji Takeda, Takuro Fujii, Takaaki Kakitsuka, Tai Tsuchizawa, Hiroshi Fukuda, Shinji Matsuo

Research output: Contribution to journalReview article

Abstract

This paper reviews a technology to heterogeneously integrate III-V semiconductors on a Si platform for the laser diodes and high-efficiency Mach-Zehnder modulators (MZMs) of optical transceivers. Membrane III-V semiconductor films provide efficient optical coupling between the III-V semiconductor devices and widely developed thin Si waveguide circuits. The membrane laser diode shows a fiber coupled output power from the Si waveguide of 4.6 mW and single-mode lasing with a side-mode suppression ratio of 49 dB. In addition, the high-efficiency MZM with a 700 μm long membrane InGaAsP/Si metal-oxide-semiconductor capacitor phase shifter shows a V π L of 0.09 Vcm, insertion loss of around 2 dB, and an eye opening at for 32 Gbit s -1 nonreturn-to-zero signal with pre-emphasis signal inputs.

Original languageEnglish
Article numberSB0803
JournalJapanese journal of applied physics
Volume58
Issue numberSB
DOIs
Publication statusPublished - 2019 Jan 1
Externally publishedYes

Fingerprint

Modulators
Mach number
Semiconductor lasers
modulators
semiconductor lasers
membranes
Membranes
Waveguides
Optical transceivers
waveguides
Optical fiber coupling
optical coupling
Phase shifters
transmitter receivers
Semiconductor devices
Insertion losses
semiconductor devices
insertion loss
metal oxide semiconductors
lasing

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

III-V/Si integration technology for laser diodes and Mach-Zehnder modulators. / Hiraki, Tatsurou; Aihara, Takuma; Takeda, Koji; Fujii, Takuro; Kakitsuka, Takaaki; Tsuchizawa, Tai; Fukuda, Hiroshi; Matsuo, Shinji.

In: Japanese journal of applied physics, Vol. 58, No. SB, SB0803, 01.01.2019.

Research output: Contribution to journalReview article

Hiraki, T, Aihara, T, Takeda, K, Fujii, T, Kakitsuka, T, Tsuchizawa, T, Fukuda, H & Matsuo, S 2019, 'III-V/Si integration technology for laser diodes and Mach-Zehnder modulators', Japanese journal of applied physics, vol. 58, no. SB, SB0803. https://doi.org/10.7567/1347-4065/ab0741
Hiraki, Tatsurou ; Aihara, Takuma ; Takeda, Koji ; Fujii, Takuro ; Kakitsuka, Takaaki ; Tsuchizawa, Tai ; Fukuda, Hiroshi ; Matsuo, Shinji. / III-V/Si integration technology for laser diodes and Mach-Zehnder modulators. In: Japanese journal of applied physics. 2019 ; Vol. 58, No. SB.
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AU - Fukuda, Hiroshi

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