Impact of high pressure dry O2 oxidation on sub-quarter micron planarized LOCOS

T. Yamashita, T. Kuroi, T. Uchida, S. Komori, K. Kobayashi, M. Inuishi, H. Miyoshi

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Impact of high pressure dry O<sub>2</sub> oxidation on sub-quarter micron planarized LOCOS'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds