Impact of structural strained layer near SiO2/Si interface on activation energy of time-dependent dielectric breakdown

Yoshinao Harada*, Koji Eriguchi, Masaaki Niwa, Takanobu Watanabe, Iwao Ohdomari

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

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Engineering & Materials Science

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