Improved inclined multi-lithography using water as exposure medium and its 3D mixing microchannel application

Hironobu Sato, Daisuke Yagyu, Seiki Ito, Shuichi Shoji

    Research output: Contribution to journalArticle

    41 Citations (Scopus)

    Abstract

    This paper presents the inclined UV lithography in water medium and 3D mixing microchannel application. The theoretical limit of the inclination angle of the structure is determined by the difference of the refractive index between air and SU-8. In order to reduce the mismatch of the refractive index between air and photoresist, DI water was used as exposure medium instead of air. As a result, the maximum angle of the inclined structure was improved from 38.7°(in air) to 56.2°(in water). Fine and high aspect ratio SU-8 structures were obtained using UV exposure in water medium. As a microfluidic application, a microchannel having 3D slanted grooves was designed and fabricated. 45°slanted grooves were formed successfully on the sidewalls of the microchannel by using inclined UV exposure in water medium. Mixing efficiency of this microchannel was evaluated by CFD simulation and cross-sectional fluorescence image detection using confocal microscope.

    Original languageEnglish
    Pages (from-to)183-190
    Number of pages8
    JournalSensors and Actuators, A: Physical
    Volume128
    Issue number1
    DOIs
    Publication statusPublished - 2006 Mar 31

    Fingerprint

    microchannels
    Microchannels
    Lithography
    lithography
    Water
    water
    air
    Air
    grooves
    Refractive index
    refractivity
    Photoresists
    charge flow devices
    high aspect ratio
    Microfluidics
    photoresists
    inclination
    Aspect ratio
    Computational fluid dynamics
    Microscopes

    Keywords

    • 3D microstructures
    • CFD simulation
    • Inclined multi-lithography
    • Micromixing
    • UV exposure in water medium

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering
    • Instrumentation

    Cite this

    Improved inclined multi-lithography using water as exposure medium and its 3D mixing microchannel application. / Sato, Hironobu; Yagyu, Daisuke; Ito, Seiki; Shoji, Shuichi.

    In: Sensors and Actuators, A: Physical, Vol. 128, No. 1, 31.03.2006, p. 183-190.

    Research output: Contribution to journalArticle

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