TY - JOUR
T1 - Improved inclined multi-lithography using water as exposure medium and its 3D mixing microchannel application
AU - Sato, Hironobu
AU - Yagyu, Daisuke
AU - Ito, Seiki
AU - Shoji, Shuichi
N1 - Funding Information:
This work was partly supported by Japan Ministry of Education, Culture, Sports, Science and Technology Grant-in-Aid for COE Research of Waseda University, Establishment of Consolidated Research Institute for Advanced Science and Medical Care, Scientific Basic Research (A) No. 12450167, Japan Society for the Promotion Science Grant-in-Aid for Creative Scientific Research No. 13G0024 and CREST, Japan Science and Technology Agency.
PY - 2006/3/31
Y1 - 2006/3/31
N2 - This paper presents the inclined UV lithography in water medium and 3D mixing microchannel application. The theoretical limit of the inclination angle of the structure is determined by the difference of the refractive index between air and SU-8. In order to reduce the mismatch of the refractive index between air and photoresist, DI water was used as exposure medium instead of air. As a result, the maximum angle of the inclined structure was improved from 38.7°(in air) to 56.2°(in water). Fine and high aspect ratio SU-8 structures were obtained using UV exposure in water medium. As a microfluidic application, a microchannel having 3D slanted grooves was designed and fabricated. 45°slanted grooves were formed successfully on the sidewalls of the microchannel by using inclined UV exposure in water medium. Mixing efficiency of this microchannel was evaluated by CFD simulation and cross-sectional fluorescence image detection using confocal microscope.
AB - This paper presents the inclined UV lithography in water medium and 3D mixing microchannel application. The theoretical limit of the inclination angle of the structure is determined by the difference of the refractive index between air and SU-8. In order to reduce the mismatch of the refractive index between air and photoresist, DI water was used as exposure medium instead of air. As a result, the maximum angle of the inclined structure was improved from 38.7°(in air) to 56.2°(in water). Fine and high aspect ratio SU-8 structures were obtained using UV exposure in water medium. As a microfluidic application, a microchannel having 3D slanted grooves was designed and fabricated. 45°slanted grooves were formed successfully on the sidewalls of the microchannel by using inclined UV exposure in water medium. Mixing efficiency of this microchannel was evaluated by CFD simulation and cross-sectional fluorescence image detection using confocal microscope.
KW - 3D microstructures
KW - CFD simulation
KW - Inclined multi-lithography
KW - Micromixing
KW - UV exposure in water medium
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U2 - 10.1016/j.sna.2005.12.043
DO - 10.1016/j.sna.2005.12.043
M3 - Article
AN - SCOPUS:33645138130
SN - 0924-4247
VL - 128
SP - 183
EP - 190
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 1
ER -