Improvement in the ion-detection sensitivity of the pressure measurement method using nonresonant laser ionization

K. Kokubun, Shingo Ichimura, M. Hirata, S. Sekine, A. Kurokawa

Research output: Contribution to journalArticle

Abstract

In order to increase the ion-detection efficiency of pressure measurement using nonresonant laser ionization method, a Channeltron of aperture 19 mm was used in the ion-detection head and pressure measurement was carried out with H2. The detection efficiency was increased about 1.5 times compared to a previous result. The volume of the ionization region estimated from the present measurement, 5.8 × 10-4 mm3, is close to that derived from the direct observation of the ion distribution in the ionization region, 6.4 × 10-4 mm3.

Original languageEnglish
Pages (from-to)727-729
Number of pages3
JournalVacuum
Volume48
Issue number7-9
Publication statusPublished - 1997 Sep 1
Externally publishedYes

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ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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