Improvement of c-Axis Parallel Orientaition of ZnO film on Silica Glass Pipes with Various Diameters for SH-SAW Pipe Sensor

Takuya Wakabayashi, Shinji Takayanagi, Mami Matukawa, Yuta Takamura, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Shear horizontal surface acoustic wave (SH-SAW) sensors have been studied for measurements of liquid properties. The long-distance propagation of SH-SAW with multiple wave roundtrips on a pipe surface improve the measurement sensitivity. c-Axis parallel oriented ZnO films can excite the SH-SAW and be grown on a curved surface by a sputtering deposition. In this study, the ZnO film growths on pipe surfaces with various pipe diameters were demonstrated. The c-axis parallel oriented ZnO film with high orientation was only obtained on the pipe surface facing the sputtering target plane. A slit which limits the deposition area and an automatic rotation system of the pipe were effective for the uniform film growth on the entire pipe surface. This film/pipe substrate structure is a good candidate for the SHSAW sensor with high sensitivity.

Original languageEnglish
Title of host publication2019 IEEE International Ultrasonics Symposium, IUS 2019
PublisherIEEE Computer Society
Pages671-674
Number of pages4
ISBN (Electronic)9781728145969
DOIs
Publication statusPublished - 2019 Oct
Event2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom
Duration: 2019 Oct 62019 Oct 9

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2019-October
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2019 IEEE International Ultrasonics Symposium, IUS 2019
CountryUnited Kingdom
CityGlasgow
Period19/10/619/10/9

Keywords

  • c-Axis parallel oriented film
  • Pipe structure
  • Sputtering deposition
  • Surface acoustic wave
  • ZnO

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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  • Cite this

    Wakabayashi, T., Takayanagi, S., Matukawa, M., Takamura, Y., & Yanagitani, T. (2019). Improvement of c-Axis Parallel Orientaition of ZnO film on Silica Glass Pipes with Various Diameters for SH-SAW Pipe Sensor. In 2019 IEEE International Ultrasonics Symposium, IUS 2019 (pp. 671-674). [8925796] (IEEE International Ultrasonics Symposium, IUS; Vol. 2019-October). IEEE Computer Society. https://doi.org/10.1109/ULTSYM.2019.8925796