Improvement of surface properties on microfluidic devices by Diamond-Like Carbon coatings

Y. Murayama, K. Shiba, Y. Ohgoe, Jun Mizuno, Shuichi Shoji, K. Ozeki, K. Sato, A. Alanazi, K. Hirakuri

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Studies of Diamond-Like Carbon (DLC) coated medical devices have reported possibility for developing blood analysis devices. DLC film is a surface modification technique for biomaterials due to their hemocompatibility, low friction, and reasonableness. To estimate the hemocompatibility of DLC films on microfluidic devices, we have coated DLC film on silicon (Si), and SU-8 by using RF plasma chemical vapor deposition system. Si and SU-8 have been used extensively in microchannel devices<sup>[1-3]</sup>. The hemocompatibility, chemical composition, structure, wettability, chemical stability, and surface morphology of the samples have been investigated by in-vitro test, X-ray photoelectron spectroscopy (XPS), Raman spectroscopy (Raman), a contact angle measurement, immersion test, scanning electron microscopy (SEM). The result indicated that the satisfied hemocompatibility and chemical stability was obtained for the DLC on SU-8. DLC coating is expected as a surface modification technique for the microchannel of microfluidic devices.

Original languageEnglish
Title of host publicationICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages874-877
Number of pages4
ISBN (Print)9784904090138
DOIs
Publication statusPublished - 2015 May 20
Event2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015 - Kyoto, Japan
Duration: 2015 Apr 142015 Apr 17

Other

Other2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015
CountryJapan
CityKyoto
Period15/4/1415/4/17

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Keywords

  • diamond-like carbon (DLC)
  • hemocompatibility
  • microchannel
  • microfluidic device

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Murayama, Y., Shiba, K., Ohgoe, Y., Mizuno, J., Shoji, S., Ozeki, K., Sato, K., Alanazi, A., & Hirakuri, K. (2015). Improvement of surface properties on microfluidic devices by Diamond-Like Carbon coatings. In ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (pp. 874-877). [7111138] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICEP-IAAC.2015.7111138