Improvement of surface properties on microfluidic devices by Diamond-Like Carbon coatings

Y. Murayama; K. Shiba; Y. Ohgoe; Jun Mizuno; Shuichi Shoji; K. Ozeki; K. Sato; A. Alanazi; K. Hirakuri

doi:10.1109/ICEP-IAAC.2015.7111138

Improvement of surface properties on microfluidic devices by Diamond-Like Carbon coatings

Y. Murayama, K. Shiba, Y. Ohgoe, Jun Mizuno, Shuichi Shoji, K. Ozeki, K. Sato, A. Alanazi, K. Hirakuri

Research Organization for Nano & Life Innovation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Studies of Diamond-Like Carbon (DLC) coated medical devices have reported possibility for developing blood analysis devices. DLC film is a surface modification technique for biomaterials due to their hemocompatibility, low friction, and reasonableness. To estimate the hemocompatibility of DLC films on microfluidic devices, we have coated DLC film on silicon (Si), and SU-8 by using RF plasma chemical vapor deposition system. Si and SU-8 have been used extensively in microchannel devices<sup>[1-3]</sup>. The hemocompatibility, chemical composition, structure, wettability, chemical stability, and surface morphology of the samples have been investigated by in-vitro test, X-ray photoelectron spectroscopy (XPS), Raman spectroscopy (Raman), a contact angle measurement, immersion test, scanning electron microscopy (SEM). The result indicated that the satisfied hemocompatibility and chemical stability was obtained for the DLC on SU-8. DLC coating is expected as a surface modification technique for the microchannel of microfluidic devices.

Original language	English
Title of host publication	ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	874-877
Number of pages	4
ISBN (Print)	9784904090138
DOIs	https://doi.org/10.1109/ICEP-IAAC.2015.7111138
Publication status	Published - 2015 May 20
Event	2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015 - Kyoto, Japan Duration: 2015 Apr 14 → 2015 Apr 17

Other

Other	2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015
Country	Japan
City	Kyoto
Period	15/4/14 → 15/4/17

Keywords

diamond-like carbon (DLC)
hemocompatibility
microchannel
microfluidic device

ASJC Scopus subject areas

Electrical and Electronic Engineering

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Murayama, Y., Shiba, K., Ohgoe, Y., Mizuno, J., Shoji, S., Ozeki, K., Sato, K., Alanazi, A., & Hirakuri, K. (2015). Improvement of surface properties on microfluidic devices by Diamond-Like Carbon coatings. In ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference (pp. 874-877). [7111138] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICEP-IAAC.2015.7111138

Improvement of surface properties on microfluidic devices by Diamond-Like Carbon coatings. / Murayama, Y.; Shiba, K.; Ohgoe, Y.; Mizuno, Jun ; Shoji, Shuichi; Ozeki, K.; Sato, K.; Alanazi, A.; Hirakuri, K.

ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference. Institute of Electrical and Electronics Engineers Inc., 2015. p. 874-877 7111138.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Murayama, Y, Shiba, K, Ohgoe, Y, Mizuno, J , Shoji, S, Ozeki, K, Sato, K, Alanazi, A & Hirakuri, K 2015, Improvement of surface properties on microfluidic devices by Diamond-Like Carbon coatings. in ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference., 7111138, Institute of Electrical and Electronics Engineers Inc., pp. 874-877, 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference, ICEP-IAAC 2015, Kyoto, Japan, 15/4/14. https://doi.org/10.1109/ICEP-IAAC.2015.7111138

Murayama Y, Shiba K, Ohgoe Y, Mizuno J , Shoji S, Ozeki K et al. Improvement of surface properties on microfluidic devices by Diamond-Like Carbon coatings. In ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference. Institute of Electrical and Electronics Engineers Inc. 2015. p. 874-877. 7111138 https://doi.org/10.1109/ICEP-IAAC.2015.7111138

Murayama, Y. ; Shiba, K. ; Ohgoe, Y. ; Mizuno, Jun ; Shoji, Shuichi ; Ozeki, K. ; Sato, K. ; Alanazi, A. ; Hirakuri, K. / Improvement of surface properties on microfluidic devices by Diamond-Like Carbon coatings. ICEP-IAAC 2015 - 2015 International Conference on Electronic Packaging and iMAPS All Asia Conference. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 874-877

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AU - Sato, K.

AU - Alanazi, A.

AU - Hirakuri, K.

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AB - Studies of Diamond-Like Carbon (DLC) coated medical devices have reported possibility for developing blood analysis devices. DLC film is a surface modification technique for biomaterials due to their hemocompatibility, low friction, and reasonableness. To estimate the hemocompatibility of DLC films on microfluidic devices, we have coated DLC film on silicon (Si), and SU-8 by using RF plasma chemical vapor deposition system. Si and SU-8 have been used extensively in microchannel devices[1-3]. The hemocompatibility, chemical composition, structure, wettability, chemical stability, and surface morphology of the samples have been investigated by in-vitro test, X-ray photoelectron spectroscopy (XPS), Raman spectroscopy (Raman), a contact angle measurement, immersion test, scanning electron microscopy (SEM). The result indicated that the satisfied hemocompatibility and chemical stability was obtained for the DLC on SU-8. DLC coating is expected as a surface modification technique for the microchannel of microfluidic devices.

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