Improvement of the durability of crosslinked PTFE molds for UV- /EB-nanoimprint lithography

Tomohiro Takahashi, Akinobu Kobayashi, Satoshi Okubo, Tomoko Gowa Oyama, Takaharu Miura, Akihiro Oshima, Seiichi Tagawa, Masakazu Washio

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Engineering & Materials Science

Chemical Compounds