Improvements of an X-ray microcalorimeter for detecting cosmic rays

Y. Yokoyama, Shuichi Shoji, K. Mitsuda, R. Fujimoto, T. Miyazaki, T. Oshima, M. Yamazaki, N. Iyomoto, K. Futamoto, Y. Ishizaki, T. Kagei

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

    Abstract

    An X-ray microcalorimeter that consists of an x-ray absorber to transfer the incident photon energy to the temperature rise, a temperature sensor to detect the temperature change and suspending beams for thermal isolation from the substrate have been fabricated. Titanium/Gold thin film transition edge sensor (TES) is used as the temperature sensor. We fabricated and tested the first prototype in the previous study and obtained the transition temperature of 0.52K, energy resolution of 550eV (FWHM) for 6keV radiation. These values were smaller than that of expected. We applied a Sn absorber and redesigned the microstructure of the x-ray microcalorimeter. Consequently, we have obtained 158eV at 5.9keV radiation of the energy resolution, which is about 4 times higher than that of the first prototype. This value is nearly equal to the conventional X-ray CCD. The highest energy resolution of the x-ray microcalorimeter of our design is estimated to ∼5 eV at the operating point of 0.2K. To realize such a good energy resolution calorimeter army, we are going to improve the sensitivity of the TES by optimizing the process condition. A Sn absorber formed by electroplating is also under evaluating simultaneously. It is necessary to fabricate uniform array structures.

    Original languageEnglish
    Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
    EditorsK. Chau, A.M. Parameswaran, F.E.H. Tay
    Pages58-65
    Number of pages8
    Volume4230
    DOIs
    Publication statusPublished - 2000
    EventMicromachining and Microfabrication - Singapure, Singapore
    Duration: 2000 Nov 282000 Nov 30

    Other

    OtherMicromachining and Microfabrication
    CountrySingapore
    CitySingapure
    Period00/11/2800/11/30

    Fingerprint

    Cosmic rays
    calorimeters
    cosmic rays
    X rays
    absorbers
    temperature sensors
    Temperature sensors
    x rays
    prototypes
    energy
    Radiation
    sensors
    electroplating
    Sensors
    Electroplating
    radiation
    Full width at half maximum
    Calorimeters
    Charge coupled devices
    Superconducting transition temperature

    Keywords

    • Calorimeter
    • Image sensor
    • Radiation sensor
    • Superconductor
    • TES
    • X-ray

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Condensed Matter Physics

    Cite this

    Yokoyama, Y., Shoji, S., Mitsuda, K., Fujimoto, R., Miyazaki, T., Oshima, T., ... Kagei, T. (2000). Improvements of an X-ray microcalorimeter for detecting cosmic rays. In K. Chau, A. M. Parameswaran, & F. E. H. Tay (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4230, pp. 58-65) https://doi.org/10.1117/12.404915

    Improvements of an X-ray microcalorimeter for detecting cosmic rays. / Yokoyama, Y.; Shoji, Shuichi; Mitsuda, K.; Fujimoto, R.; Miyazaki, T.; Oshima, T.; Yamazaki, M.; Iyomoto, N.; Futamoto, K.; Ishizaki, Y.; Kagei, T.

    Proceedings of SPIE - The International Society for Optical Engineering. ed. / K. Chau; A.M. Parameswaran; F.E.H. Tay. Vol. 4230 2000. p. 58-65.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Yokoyama, Y, Shoji, S, Mitsuda, K, Fujimoto, R, Miyazaki, T, Oshima, T, Yamazaki, M, Iyomoto, N, Futamoto, K, Ishizaki, Y & Kagei, T 2000, Improvements of an X-ray microcalorimeter for detecting cosmic rays. in K Chau, AM Parameswaran & FEH Tay (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4230, pp. 58-65, Micromachining and Microfabrication, Singapure, Singapore, 00/11/28. https://doi.org/10.1117/12.404915
    Yokoyama Y, Shoji S, Mitsuda K, Fujimoto R, Miyazaki T, Oshima T et al. Improvements of an X-ray microcalorimeter for detecting cosmic rays. In Chau K, Parameswaran AM, Tay FEH, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4230. 2000. p. 58-65 https://doi.org/10.1117/12.404915
    Yokoyama, Y. ; Shoji, Shuichi ; Mitsuda, K. ; Fujimoto, R. ; Miyazaki, T. ; Oshima, T. ; Yamazaki, M. ; Iyomoto, N. ; Futamoto, K. ; Ishizaki, Y. ; Kagei, T. / Improvements of an X-ray microcalorimeter for detecting cosmic rays. Proceedings of SPIE - The International Society for Optical Engineering. editor / K. Chau ; A.M. Parameswaran ; F.E.H. Tay. Vol. 4230 2000. pp. 58-65
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