In-channel 3-D micromesh structures using maskless multi-angle exposures and their microfilter application

Hironobu Sato, Takayuki Kakinuma, Jeung Sang Go, Shuichi Shoji

    Research output: Contribution to journalArticle

    55 Citations (Scopus)

    Abstract

    This paper presents a fabrication method of in-channel three-dimensional micromesh structures using conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Number of exposures and irradiation angles decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated using the same Cr pattern on the glass substrate. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of micro total analysis systems (μTAS), the microfilter was fabricated and its filtering property was demonstrated.

    Original languageEnglish
    Pages (from-to)87-92
    Number of pages6
    JournalSensors and Actuators, A: Physical
    Volume111
    Issue number1
    DOIs
    Publication statusPublished - 2004 Mar 1

    Fingerprint

    Glass
    flow resistance
    glass
    systems analysis
    Photolithography
    Substrates
    photolithography
    microchannels
    Microchannels
    Ultraviolet radiation
    Hydrodynamics
    Metals
    hydrodynamics
    Irradiation
    Fabrication
    fabrication
    irradiation
    metals

    Keywords

    • 3-D micromesh structure
    • Backside exposure
    • In-channel microfilter
    • SU-8

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering
    • Mechanical Engineering
    • Instrumentation

    Cite this

    In-channel 3-D micromesh structures using maskless multi-angle exposures and their microfilter application. / Sato, Hironobu; Kakinuma, Takayuki; Go, Jeung Sang; Shoji, Shuichi.

    In: Sensors and Actuators, A: Physical, Vol. 111, No. 1, 01.03.2004, p. 87-92.

    Research output: Contribution to journalArticle

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