In situ optical monitoring of the GaAs growth process in MOCVD

Toshiki Makimoto, Yoshiharu Yamauchi, Naoki Kobayashi, Yoshiji Horikoshi

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

A new optical method for in situ monitoring of epitaxial growth is proposed and applied to the growth of GaAs by metalorganic chemical vapor deposition. The growth process is investigated using optical reflection while triethylgallium and arsine are alternately supplied to the growing surface. Linearly polarized 325-nm He-CD laser light is irradiated at a 20° angle with respect to the (001)-oriented GaAs substrate surface. Laser light with a polarization E vector that is perpendicular to the substrate surface is more efficiently reflected during the triethylgallium flow period than during the arsine flow period due to the different optical absorption between Ga-and As-atomic surfaces. Therefore, we call this the 'surface photo-absorption' (SPA) method. This method provides a means for real-time control and in situ study of epitaxial growth by metalorganic chemical vapor deposition. A strong and persistent oscillation in the reflection intensity is observed when triethylgallium and arsine are alternately supplied.

Original languageEnglish
Pages (from-to)207-209
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume29
Issue number2
Publication statusPublished - 1990 Feb
Externally publishedYes

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Metallorganic chemical vapor deposition
metalorganic chemical vapor deposition
Monitoring
Epitaxial growth
optical reflection
Lasers
Real time control
photoabsorption
Substrates
Light absorption
lasers
optical absorption
optics
Polarization
oscillations
polarization

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

In situ optical monitoring of the GaAs growth process in MOCVD. / Makimoto, Toshiki; Yamauchi, Yoshiharu; Kobayashi, Naoki; Horikoshi, Yoshiji.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 29, No. 2, 02.1990, p. 207-209.

Research output: Contribution to journalArticle

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