InAs/GaAs Quantum Dot Intermixing by Dry Etching and Ion Implantation

Y. Hiraishi, T. Shirai, J. Kwoen, Y. Matushima, Hiroshi Ishikawa, Y. Arakawa, K. Utaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds