Influence of deposition temperature on the microstructure of Pb-Ti-Nb-O thin films by metallorganic chemical vapor deposition

Xue Dong Liu, Hiroshi Funakubo, Suguru Noda, Hiroshi Komiyama

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In the current study, we grew Pb-Ti-Nb-O (PTN) thin films on Pt/Ti/SiO2/Si substrate by metallorganic chemical vapor deposition (MOCVD) at temperatures ranging from 400 to 620°C. The thin films obtained were examined by X-ray diffraction and cross-sectional transmission electron microscopy. It was revealed that both the PTN film and its interface with the underlying Pt layer were quite sensitive to variations in the deposition temperature. The considerable change in surface morphology of PTN thin films with an enhanced deposition temperature is discussed in relation to the surface hillocks formed on the Pt layer by aggregation of the out-diffused Pt atoms during MOCVD.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume148
Issue number3
Publication statusPublished - 2001
Externally publishedYes

Fingerprint

Metallorganic chemical vapor deposition
vapor deposition
Thin films
microstructure
Microstructure
thin films
Temperature
Surface morphology
temperature
Agglomeration
Transmission electron microscopy
X ray diffraction
Atoms
transmission electron microscopy
Substrates
diffraction
atoms
x rays

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Influence of deposition temperature on the microstructure of Pb-Ti-Nb-O thin films by metallorganic chemical vapor deposition. / Liu, Xue Dong; Funakubo, Hiroshi; Noda, Suguru; Komiyama, Hiroshi.

In: Journal of the Electrochemical Society, Vol. 148, No. 3, 2001.

Research output: Contribution to journalArticle

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