Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films

Masashi Suzuki, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

C-axis tilted AlN films have been studied for use in quasi-shear mode devices. Highly tilted columnar structure induces the decrease of film density (void between columnar grains) because of the shadowing effect. This could affect the performance of shear mode resonator. In this study, the relationship between the acoustic properties and the grain structure is investigated in c-axis tilted AlN film. Acoustic properties of the resonators were estimated by the characteristic of conversion loss in composite resonator. In c-axis highly tilted AlN film, 1/4 and 3/4 wavelength resonance due to the decrease of shear wave velocity were observed in a number of samples. This phenomenon was not observed in longitudinal wave mode. Porous film structure was also observed in the highly tilted films by across sectional SEM image. Decrease of shear wave velocity would be caused by this structure because shear wave is more sensitive to the porous structure than longitudinal wave.

Original languageEnglish
Title of host publication2010 IEEE International Ultrasonics Symposium, IUS 2010
Pages1478-1481
Number of pages4
DOIs
Publication statusPublished - 2010 Dec 1
Event2010 IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
Duration: 2010 Oct 112010 Oct 14

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2010 IEEE International Ultrasonics Symposium, IUS 2010
CountryUnited States
CitySan Diego, CA
Period10/10/1110/10/14

Keywords

  • Acoustic properties
  • AlN
  • Shadowing effect
  • Sputtering deposition
  • c-axis tlted film

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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    Suzuki, M., & Yanagitani, T. (2010). Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films. In 2010 IEEE International Ultrasonics Symposium, IUS 2010 (pp. 1478-1481). [5935561] (Proceedings - IEEE Ultrasonics Symposium). https://doi.org/10.1109/ULTSYM.2010.5935561