Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films

Masashi Suzuki, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

C-axis tilted AlN films have been studied for use in quasi-shear mode devices. Highly tilted columnar structure induces the decrease of film density (void between columnar grains) because of the shadowing effect. This could affect the performance of shear mode resonator. In this study, the relationship between the acoustic properties and the grain structure is investigated in c-axis tilted AlN film. Acoustic properties of the resonators were estimated by the characteristic of conversion loss in composite resonator. In c-axis highly tilted AlN film, 1/4 and 3/4 wavelength resonance due to the decrease of shear wave velocity were observed in a number of samples. This phenomenon was not observed in longitudinal wave mode. Porous film structure was also observed in the highly tilted films by across sectional SEM image. Decrease of shear wave velocity would be caused by this structure because shear wave is more sensitive to the porous structure than longitudinal wave.

Original languageEnglish
Title of host publicationProceedings - IEEE Ultrasonics Symposium
Pages1478-1481
Number of pages4
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event2010 IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
Duration: 2010 Oct 112010 Oct 14

Other

Other2010 IEEE International Ultrasonics Symposium, IUS 2010
CountryUnited States
CitySan Diego, CA
Period10/10/1110/10/14

Fingerprint

acoustic properties
shear
S waves
resonators
longitudinal waves
voids
scanning electron microscopy
composite materials
wavelengths

Keywords

  • Acoustic properties
  • AlN
  • c-axis tlted film
  • Shadowing effect
  • Sputtering deposition

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

Cite this

Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films. / Suzuki, Masashi; Yanagitani, Takahiko.

Proceedings - IEEE Ultrasonics Symposium. 2010. p. 1478-1481 5935561.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Suzuki, M & Yanagitani, T 2010, Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films. in Proceedings - IEEE Ultrasonics Symposium., 5935561, pp. 1478-1481, 2010 IEEE International Ultrasonics Symposium, IUS 2010, San Diego, CA, United States, 10/10/11. https://doi.org/10.1109/ULTSYM.2010.5935561
Suzuki, Masashi ; Yanagitani, Takahiko. / Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films. Proceedings - IEEE Ultrasonics Symposium. 2010. pp. 1478-1481
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