Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas

Reiho Amano, Thang Hung Dinh, Atsushi Sasanuma, Goki Arai, Hiroyuki Hara, Yusuke Fujii, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Atsushi Sunahara, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Kazuyuki Sakaue, Taisuke Miura, Gerry O'Sullivan, Takeshi Higashiguchi

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amplifier. The results clearly show the spectral profiles possess all of the desired characteristics as well as the possibility of obtaining an energy conversion efficiency close to the theoretical upper limit. It is also shown that it is necessary to irradiate with pulse durations less than 10ns to optimize efficient EUV emission using Sn and Gd targets.

Original languageEnglish
Article number070311
JournalJapanese Journal of Applied Physics
Volume57
Issue number7
DOIs
Publication statusPublished - 2018 Jul 1

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Carbon dioxide lasers
Semiconductor switches
Laser produced plasmas
carbon dioxide lasers
ultraviolet emission
Energy conversion
Germanium
laser plasmas
Conversion efficiency
Laser pulses
pulse duration
Infrared radiation
Substrates
pulses
energy conversion efficiency
germanium
switches
amplifiers
profiles
energy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas. / Amano, Reiho; Dinh, Thang Hung; Sasanuma, Atsushi; Arai, Goki; Hara, Hiroyuki; Fujii, Yusuke; Hatano, Tadashi; Ejima, Takeo; Jiang, Weihua; Sunahara, Atsushi; Takahashi, Akihiko; Nakamura, Daisuke; Okada, Tatsuo; Sakaue, Kazuyuki; Miura, Taisuke; O'Sullivan, Gerry; Higashiguchi, Takeshi.

In: Japanese Journal of Applied Physics, Vol. 57, No. 7, 070311, 01.07.2018.

Research output: Contribution to journalArticle

Amano, R, Dinh, TH, Sasanuma, A, Arai, G, Hara, H, Fujii, Y, Hatano, T, Ejima, T, Jiang, W, Sunahara, A, Takahashi, A, Nakamura, D, Okada, T, Sakaue, K, Miura, T, O'Sullivan, G & Higashiguchi, T 2018, 'Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas', Japanese Journal of Applied Physics, vol. 57, no. 7, 070311. https://doi.org/10.7567/JJAP.57.070311
Amano, Reiho ; Dinh, Thang Hung ; Sasanuma, Atsushi ; Arai, Goki ; Hara, Hiroyuki ; Fujii, Yusuke ; Hatano, Tadashi ; Ejima, Takeo ; Jiang, Weihua ; Sunahara, Atsushi ; Takahashi, Akihiko ; Nakamura, Daisuke ; Okada, Tatsuo ; Sakaue, Kazuyuki ; Miura, Taisuke ; O'Sullivan, Gerry ; Higashiguchi, Takeshi. / Influence of short pulse duration of carbon dioxide lasers on extreme ultraviolet emission from laser-produced plasmas. In: Japanese Journal of Applied Physics. 2018 ; Vol. 57, No. 7.
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