Initial stage of Au adsorption onto a Si(111) surface studied by scanning tunneling microscopy

T. Hasegawa, K. Takata, S. Hosaka, S. Hosoki

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

The initial stage of Au adsorption onto a Si (111) surface (< 0.2 ML) is studied by scanning tunneling microscopy (STM). Au is deposited at room temperature, and then the sample is annealed at 700°c. At the very early stage of Au adsorption, a Au-adsorbed 5 × structure is found not to break a 7 × 7 structure. By increasing the amount of adsorbed Au, the Si substrate itself shows a 5 × structure. Rows of the Au-adsorbed 5 × structure are observed to have grown from the lower side of steps.

Original languageEnglish
Pages (from-to)758-760
Number of pages3
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume9
Issue number2
DOIs
Publication statusPublished - 1991 Mar 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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