Initial stages of reactions between monolayer Fe and Si(001) surfaces

M. Hasegawa, Naoto Kobayashi, N. Hayashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Reactions between 1.5 monolayer(ML) Fe deposited on Si(001)-2 × 1 and -dihydride surfaces were studied in situ by reflection high-energy electron diffraction and time-of-flight ion scattering spectrometry with the use of 25 keV H ions. The reactions between Fe and Si which were successively deposited on Si(001)-dihydride surface were also studied. After the room temperature deposition Fe reacted with Si(001)-2 × 1 substrate resulting in the formation of polycrystalline Fe5Si3. By annealing to 560approx.650°C composite heteroepitaxial layer of both type A and type B β-FeSi2 was formed. On the dihydride surface polycrystalline Fe was observed after 1.5ML Fe deposition at room temperature, and reaction between Fe and Si(001)-dihydride surface is not likely at room temperature. We observed 3D rough surface when we deposited only Fe layer on the dihydride surface and annealed above 700°C. The hydrogen termination of Si(001) surface prevents the deposited Fe from diffusing into the substrate below 500°C, however the annealing above 710°C leads to the diffusion. We obtained 2D ordered surface, which showed 3 × 3 RHEED pattern as referenced to the primitive unreconstructed Si(001) surface net, when we deposited 2.5ML Fe and 5.8ML Si successively onto Si(001)-dihydride surface and annealed to 470°C.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages529-534
Number of pages6
Volume402
Publication statusPublished - 1996
Externally publishedYes
EventProceedings of the 1995 MRS Fall Symposium - Boston, MA, USA
Duration: 1995 Nov 271995 Nov 30

Other

OtherProceedings of the 1995 MRS Fall Symposium
CityBoston, MA, USA
Period95/11/2795/11/30

Fingerprint

Monolayers
Reflection high energy electron diffraction
Annealing
Ions
Substrates
Temperature
Spectrometry
Hydrogen
Scattering
Composite materials

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Hasegawa, M., Kobayashi, N., & Hayashi, N. (1996). Initial stages of reactions between monolayer Fe and Si(001) surfaces. In Materials Research Society Symposium - Proceedings (Vol. 402, pp. 529-534). Materials Research Society.

Initial stages of reactions between monolayer Fe and Si(001) surfaces. / Hasegawa, M.; Kobayashi, Naoto; Hayashi, N.

Materials Research Society Symposium - Proceedings. Vol. 402 Materials Research Society, 1996. p. 529-534.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hasegawa, M, Kobayashi, N & Hayashi, N 1996, Initial stages of reactions between monolayer Fe and Si(001) surfaces. in Materials Research Society Symposium - Proceedings. vol. 402, Materials Research Society, pp. 529-534, Proceedings of the 1995 MRS Fall Symposium, Boston, MA, USA, 95/11/27.
Hasegawa M, Kobayashi N, Hayashi N. Initial stages of reactions between monolayer Fe and Si(001) surfaces. In Materials Research Society Symposium - Proceedings. Vol. 402. Materials Research Society. 1996. p. 529-534
Hasegawa, M. ; Kobayashi, Naoto ; Hayashi, N. / Initial stages of reactions between monolayer Fe and Si(001) surfaces. Materials Research Society Symposium - Proceedings. Vol. 402 Materials Research Society, 1996. pp. 529-534
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