InP 2D nano-structures fabricated by two-time laser holography

T. Ohira, T. Segawa, K. Nagai, S. Takahashi, Katsuyuki Utaka, M. Nakao

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    We have fabricated two-dimensional nano-structures on (100)-InP substrates using two-time laser holography and subsequent wet and/or dry etching. Triangular and square lattice patterns with a period of 500 nm have been successfully fabricated over a large area of the substrates. We have also measured the reflectivity of the samples.

    Original languageEnglish
    Title of host publicationConference Proceedings - International Conference on Indium Phosphide and Related Materials
    Pages268-271
    Number of pages4
    Publication statusPublished - 2001
    Event2001 International Conference on Indium Phosphide and Related Materials - Nara
    Duration: 2001 May 142001 May 18

    Other

    Other2001 International Conference on Indium Phosphide and Related Materials
    CityNara
    Period01/5/1401/5/18

    Fingerprint

    Holography
    holography
    Dry etching
    Lasers
    Substrates
    lasers
    etching
    reflectance

    ASJC Scopus subject areas

    • Materials Science(all)
    • Physics and Astronomy(all)

    Cite this

    Ohira, T., Segawa, T., Nagai, K., Takahashi, S., Utaka, K., & Nakao, M. (2001). InP 2D nano-structures fabricated by two-time laser holography. In Conference Proceedings - International Conference on Indium Phosphide and Related Materials (pp. 268-271)

    InP 2D nano-structures fabricated by two-time laser holography. / Ohira, T.; Segawa, T.; Nagai, K.; Takahashi, S.; Utaka, Katsuyuki; Nakao, M.

    Conference Proceedings - International Conference on Indium Phosphide and Related Materials. 2001. p. 268-271.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Ohira, T, Segawa, T, Nagai, K, Takahashi, S, Utaka, K & Nakao, M 2001, InP 2D nano-structures fabricated by two-time laser holography. in Conference Proceedings - International Conference on Indium Phosphide and Related Materials. pp. 268-271, 2001 International Conference on Indium Phosphide and Related Materials, Nara, 01/5/14.
    Ohira T, Segawa T, Nagai K, Takahashi S, Utaka K, Nakao M. InP 2D nano-structures fabricated by two-time laser holography. In Conference Proceedings - International Conference on Indium Phosphide and Related Materials. 2001. p. 268-271
    Ohira, T. ; Segawa, T. ; Nagai, K. ; Takahashi, S. ; Utaka, Katsuyuki ; Nakao, M. / InP 2D nano-structures fabricated by two-time laser holography. Conference Proceedings - International Conference on Indium Phosphide and Related Materials. 2001. pp. 268-271
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    AU - Utaka, Katsuyuki

    AU - Nakao, M.

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