InP 2D nano-structures fabricated by two-time laser holography

T. Ohira, T. Segawa, K. Nagai, S. Takahashi, K. Utaka, M. Nakao

Research output: Contribution to conferencePaper

Abstract

We have fabricated two-dimensional nano-structures on (100)-InP substrates using two-time laser holography and subsequent wet and/or dry etching. Triangular and square lattice patterns with a period of 500 nm have been successfully fabricated over a large area of the substrates. We have also measured the reflectivity of the samples.

Original languageEnglish
Pages268-271
Number of pages4
Publication statusPublished - 2001 Jan 1
Event2001 International Conference on Indium Phosphide and Related Materials - Nara, Japan
Duration: 2001 May 142001 May 18

Conference

Conference2001 International Conference on Indium Phosphide and Related Materials
CountryJapan
CityNara
Period01/5/1401/5/18

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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    Ohira, T., Segawa, T., Nagai, K., Takahashi, S., Utaka, K., & Nakao, M. (2001). InP 2D nano-structures fabricated by two-time laser holography. 268-271. Paper presented at 2001 International Conference on Indium Phosphide and Related Materials, Nara, Japan.