InP 2D nano-structures fabricated by two-time laser holography

T. Ohira; T. Segawa; K. Nagai; S. Takahashi; K. Utaka; M. Nakao

InP 2D nano-structures fabricated by two-time laser holography

T. Ohira^*, T. Segawa, K. Nagai, S. Takahashi, K. Utaka, M. Nakao

^*Corresponding author for this work

School of Fundamental Science and Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

We have fabricated two-dimensional nano-structures on (100)-InP substrates using two-time laser holography and subsequent wet and/or dry etching. Triangular and square lattice patterns with a period of 500 nm have been successfully fabricated over a large area of the substrates. We have also measured the reflectivity of the samples.

Original language	English
Pages	268-271
Number of pages	4
Publication status	Published - 2001 Jan 1
Event	2001 International Conference on Indium Phosphide and Related Materials - Nara, Japan Duration: 2001 May 14 → 2001 May 18

Conference

Conference	2001 International Conference on Indium Phosphide and Related Materials
Country/Territory	Japan
City	Nara
Period	01/5/14 → 01/5/18

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

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title = "InP 2D nano-structures fabricated by two-time laser holography",

abstract = "We have fabricated two-dimensional nano-structures on (100)-InP substrates using two-time laser holography and subsequent wet and/or dry etching. Triangular and square lattice patterns with a period of 500 nm have been successfully fabricated over a large area of the substrates. We have also measured the reflectivity of the samples.",

author = "T. Ohira and T. Segawa and K. Nagai and S. Takahashi and K. Utaka and M. Nakao",

year = "2001",

month = jan,

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language = "English",

pages = "268--271",

note = "2001 International Conference on Indium Phosphide and Related Materials ; Conference date: 14-05-2001 Through 18-05-2001",

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TY - CONF

T1 - InP 2D nano-structures fabricated by two-time laser holography

AU - Ohira, T.

AU - Segawa, T.

AU - Nagai, K.

AU - Takahashi, S.

AU - Utaka, K.

AU - Nakao, M.

PY - 2001/1/1

Y1 - 2001/1/1

N2 - We have fabricated two-dimensional nano-structures on (100)-InP substrates using two-time laser holography and subsequent wet and/or dry etching. Triangular and square lattice patterns with a period of 500 nm have been successfully fabricated over a large area of the substrates. We have also measured the reflectivity of the samples.

AB - We have fabricated two-dimensional nano-structures on (100)-InP substrates using two-time laser holography and subsequent wet and/or dry etching. Triangular and square lattice patterns with a period of 500 nm have been successfully fabricated over a large area of the substrates. We have also measured the reflectivity of the samples.

UR - http://www.scopus.com/inward/record.url?scp=0034846287&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0034846287&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0034846287

SP - 268

EP - 271

T2 - 2001 International Conference on Indium Phosphide and Related Materials

Y2 - 14 May 2001 through 18 May 2001

ER -

InP 2D nano-structures fabricated by two-time laser holography

Abstract

Conference

ASJC Scopus subject areas

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