@article{6c6850d73537418abccfe8724216b43f,
title = "Instrument for Creating Surface Layer Structure and for in-situ Layer Observation with Surface Electron Spectroscopic Tomography",
author = "Akira Kurokawa and Shingo Ichimura and Jae Jeong and Joseph Toth and Kazuhiro Yoshihara and Yoshio Saitoh and Yoshihiro Satoh",
year = "1995",
doi = "10.3131/jvsj.38.179",
language = "English",
volume = "38",
pages = "179--182",
journal = "Shinku/Journal of the Vacuum Society of Japan",
issn = "0559-8516",
number = "3",
}