TY - JOUR
T1 - Integrated hydrophilic surface treatment system of vapor deposition polymerization and vacuum ultraviolet irradiation for chemical/biochemical microchips
AU - Shinohara, H.
AU - Hori, T.
AU - Umeda, S.
AU - Takahashi, Y.
AU - Shoji, S.
AU - Ohara, O.
AU - Mizuno, J.
N1 - Funding Information:
This research was supported by the Regional Innovation Cluster Program (City Area Type) “Formation of an Industry-Academia-Government Collaboration Cluster for the Treatment of Immunological and Allergic Diseases Based on Advanced Genome Analysis”, Waseda University Global COE Program “International Research and Education Center for Ambient SoC”, and Scientific Basic Research (A) No. 19206046 and (C) No. 22560730 sponsored by MEXT, Japan.
PY - 2011/8
Y1 - 2011/8
N2 - A novel system for hydrophilic surface treatment was developed. This system consists of a vapor deposition polymerization (VDP) unit for aromatic polyurea coating and a vacuum ultraviolet (VUV) irradiation unit for the hydrophilic treatment of the coated polyurea. Because the two vacuum chambers are connected by a load-lock system, a highly hydrophilic surface can be obtained without airborne molecular contamination (in situ process). The typical thickness of the polyurea film ranges from tens of nanometers to several micrometers. This system can be used for the high-throughput fabrication of chemical/biochemical microchips, which require a stable highly hydrophilic surface. The polyurea is made highly hydrophilic and a water contact angle of <20°is obtained. The surface free energy measurement and Fourier transform infrared (FT-IR) measurement results show that the degree of hydrophilic treatment is related to the VUV light intensity and the density of O3 and exited oxygen atoms on the polyurea.
AB - A novel system for hydrophilic surface treatment was developed. This system consists of a vapor deposition polymerization (VDP) unit for aromatic polyurea coating and a vacuum ultraviolet (VUV) irradiation unit for the hydrophilic treatment of the coated polyurea. Because the two vacuum chambers are connected by a load-lock system, a highly hydrophilic surface can be obtained without airborne molecular contamination (in situ process). The typical thickness of the polyurea film ranges from tens of nanometers to several micrometers. This system can be used for the high-throughput fabrication of chemical/biochemical microchips, which require a stable highly hydrophilic surface. The polyurea is made highly hydrophilic and a water contact angle of <20°is obtained. The surface free energy measurement and Fourier transform infrared (FT-IR) measurement results show that the degree of hydrophilic treatment is related to the VUV light intensity and the density of O3 and exited oxygen atoms on the polyurea.
KW - Hydrophilic treatment
KW - Polyurea
KW - Vacuum ultraviolet
KW - Vapor deposition polymerization
UR - http://www.scopus.com/inward/record.url?scp=79960046900&partnerID=8YFLogxK
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U2 - 10.1016/j.mee.2011.01.060
DO - 10.1016/j.mee.2011.01.060
M3 - Article
AN - SCOPUS:79960046900
VL - 88
SP - 2751
EP - 2754
JO - Microelectronic Engineering
JF - Microelectronic Engineering
SN - 0167-9317
IS - 8
ER -