Integrated micro chamber for living cell analysis with negligible dead volume sample injector

M. Kanai, H. Abe, T. Munaka, Y. Fujiyama, D. Uchida, A. Yamayoshi, H. Nakanishi, A. Murakami, S. Shoji

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

We develop the micro chamber for real-time monitoring of living cell. It is integrated with an extremely low dead volume sample injector. The chamber was fabricated by the combination of isotropic etching and deep trench etching using CCP-RIE and ICP-RIE. The reproducible sample injection of the order of 1 nL is performed. Biological cell culture of HeLa is also demonstrated in a prototype device.

Original languageEnglish
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages288-291
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
Publication statusPublished - 2003 Jan 1
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: 2003 Jun 82003 Jun 12

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period03/6/803/6/12

Keywords

  • Biological cells
  • Bonding
  • Etching
  • Filters
  • Laboratories
  • Monitoring
  • Polymers
  • Prototypes
  • System-on-a-chip
  • Valves

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Kanai, M., Abe, H., Munaka, T., Fujiyama, Y., Uchida, D., Yamayoshi, A., Nakanishi, H., Murakami, A., & Shoji, S. (2003). Integrated micro chamber for living cell analysis with negligible dead volume sample injector. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 288-291). [1215309] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 1). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1215309