Integration of bridging-structural swnts on flexible PDMS sheet by stamping transfer

Yusuke Takei, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper describes an integration method of bridging-structural single-walled carbon nanotubes ( SWNTs ) onto the flexible PDMS sheet by stamping transfer. Silicon microstructures and the SWNTs which directly synthesized between the gaps of the microstructures were lifted off by PDMS stamp sheets with high yield ( 97.8 % ) and accuracy ( position error < 100 nm ). From the SEM observation of our transferred structures, we confirmed that our method could transfer the bridging-structural SWNTs on to the flexible materials without any damage to the SWNTs' bridging.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages551-554
Number of pages4
DOIs
Publication statusPublished - 2009
Externally publishedYes
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29

Other

Other22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
CountryItaly
CitySorrento
Period09/1/2509/1/29

Fingerprint

stamping
Stamping
Single-walled carbon nanotubes (SWCN)
carbon nanotubes
position errors
microstructure
Microstructure
Silicon
damage
Scanning electron microscopy
scanning electron microscopy
silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Takei, Y., Kan, T., Iwase, E., Matsumoto, K., & Shimoyama, I. (2009). Integration of bridging-structural swnts on flexible PDMS sheet by stamping transfer. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 551-554). [4805441] https://doi.org/10.1109/MEMSYS.2009.4805441

Integration of bridging-structural swnts on flexible PDMS sheet by stamping transfer. / Takei, Yusuke; Kan, Tetsuo; Iwase, Eiji; Matsumoto, Kiyoshi; Shimoyama, Isao.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2009. p. 551-554 4805441.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takei, Y, Kan, T, Iwase, E, Matsumoto, K & Shimoyama, I 2009, Integration of bridging-structural swnts on flexible PDMS sheet by stamping transfer. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4805441, pp. 551-554, 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, Sorrento, Italy, 09/1/25. https://doi.org/10.1109/MEMSYS.2009.4805441
Takei Y, Kan T, Iwase E, Matsumoto K, Shimoyama I. Integration of bridging-structural swnts on flexible PDMS sheet by stamping transfer. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2009. p. 551-554. 4805441 https://doi.org/10.1109/MEMSYS.2009.4805441
Takei, Yusuke ; Kan, Tetsuo ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / Integration of bridging-structural swnts on flexible PDMS sheet by stamping transfer. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2009. pp. 551-554
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