Integration of bridging-structural swnts on flexible PDMS sheet by stamping transfer

Yusuke Takei; Tetsuo Kan; Eiji Iwase; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2009.4805441

Integration of bridging-structural swnts on flexible PDMS sheet by stamping transfer

Yusuke Takei^*, Tetsuo Kan, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

Abstract

This paper describes an integration method of bridging-structural single-walled carbon nanotubes ( SWNTs ) onto the flexible PDMS sheet by stamping transfer. Silicon microstructures and the SWNTs which directly synthesized between the gaps of the microstructures were lifted off by PDMS stamp sheets with high yield ( 97.8 % ) and accuracy ( position error < 100 nm ). From the SEM observation of our transferred structures, we confirmed that our method could transfer the bridging-structural SWNTs on to the flexible materials without any damage to the SWNTs' bridging.

Original language	English
Article number	4805441
Pages (from-to)	551-554
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2009.4805441
Publication status	Published - 2009 Jun 1
Externally published	Yes
Event	22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy Duration: 2009 Jan 25 → 2009 Jan 29

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2009.4805441

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title = "Integration of bridging-structural swnts on flexible PDMS sheet by stamping transfer",

abstract = "This paper describes an integration method of bridging-structural single-walled carbon nanotubes ( SWNTs ) onto the flexible PDMS sheet by stamping transfer. Silicon microstructures and the SWNTs which directly synthesized between the gaps of the microstructures were lifted off by PDMS stamp sheets with high yield ( 97.8 % ) and accuracy ( position error < 100 nm ). From the SEM observation of our transferred structures, we confirmed that our method could transfer the bridging-structural SWNTs on to the flexible materials without any damage to the SWNTs' bridging.",

author = "Yusuke Takei and Tetsuo Kan and Eiji Iwase and Kiyoshi Matsumoto and Isao Shimoyama",

year = "2009",

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doi = "10.1109/MEMSYS.2009.4805441",

language = "English",

pages = "551--554",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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AU - Takei, Yusuke

AU - Kan, Tetsuo

AU - Iwase, Eiji

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2009/6/1

Y1 - 2009/6/1

N2 - This paper describes an integration method of bridging-structural single-walled carbon nanotubes ( SWNTs ) onto the flexible PDMS sheet by stamping transfer. Silicon microstructures and the SWNTs which directly synthesized between the gaps of the microstructures were lifted off by PDMS stamp sheets with high yield ( 97.8 % ) and accuracy ( position error < 100 nm ). From the SEM observation of our transferred structures, we confirmed that our method could transfer the bridging-structural SWNTs on to the flexible materials without any damage to the SWNTs' bridging.

AB - This paper describes an integration method of bridging-structural single-walled carbon nanotubes ( SWNTs ) onto the flexible PDMS sheet by stamping transfer. Silicon microstructures and the SWNTs which directly synthesized between the gaps of the microstructures were lifted off by PDMS stamp sheets with high yield ( 97.8 % ) and accuracy ( position error < 100 nm ). From the SEM observation of our transferred structures, we confirmed that our method could transfer the bridging-structural SWNTs on to the flexible materials without any damage to the SWNTs' bridging.

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JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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Integration of bridging-structural swnts on flexible PDMS sheet by stamping transfer

Abstract

ASJC Scopus subject areas

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