Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD

Jing sheng MA, Hiroshi Kawarada, Takao Yonehara, Jun ichi Suzuki, Jin Wei, Yoshihiro Yokota, Hirotaro Mori, Hiroshi Fujita, Akio Hiraki

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH4 concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO2-patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO2 dots.

Original languageEnglish
Pages (from-to)572-579
Number of pages8
JournalApplied Surface Science
Volume41-42
Issue numberC
DOIs
Publication statusPublished - 1990 Jan
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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  • Cite this

    MA, J. S., Kawarada, H., Yonehara, T., Suzuki, J. I., Wei, J., Yokota, Y., Mori, H., Fujita, H., & Hiraki, A. (1990). Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD. Applied Surface Science, 41-42(C), 572-579. https://doi.org/10.1016/0169-4332(89)90124-4