Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD

Jing sheng MA; Hiroshi Kawarada; Takao Yonehara; Jun ichi Suzuki; Jin Wei; Yoshihiro Yokota; Hirotaro Mori; Hiroshi Fujita; Akio Hiraki

doi:10.1016/0169-4332(89)90124-4

Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD

Jing sheng MA, Hiroshi Kawarada, Takao Yonehara, Jun ichi Suzuki, Jin Wei, Yoshihiro Yokota, Hirotaro Mori, Hiroshi Fujita, Akio Hiraki

School of Fundamental Science and Engineering

Research output: Contribution to journal › Article

13 Citations (Scopus)

Abstract

Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH₄ concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO₂-patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO₂ dots.

Original language	English
Pages (from-to)	572-579
Number of pages	8
Journal	Applied Surface Science
Volume	41-42
Issue number	C
DOIs	https://doi.org/10.1016/0169-4332(89)90124-4
Publication status	Published - 1990 Jan

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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MA, J. S., Kawarada, H., Yonehara, T., Suzuki, J. I., Wei, J., Yokota, Y., Mori, H., Fujita, H., & Hiraki, A. (1990). Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD. Applied Surface Science, 41-42(C), 572-579. https://doi.org/10.1016/0169-4332(89)90124-4

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title = "Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD",

abstract = "Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH4 concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO2-patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO2 dots.",

author = "MA, {Jing sheng} and Hiroshi Kawarada and Takao Yonehara and Suzuki, {Jun ichi} and Jin Wei and Yoshihiro Yokota and Hirotaro Mori and Hiroshi Fujita and Akio Hiraki",

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AU - MA, Jing sheng

AU - Kawarada, Hiroshi

AU - Yonehara, Takao

AU - Suzuki, Jun ichi

AU - Wei, Jin

AU - Yokota, Yoshihiro

AU - Mori, Hirotaro

AU - Fujita, Hiroshi

AU - Hiraki, Akio

PY - 1990/1

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N2 - Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH4 concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO2-patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO2 dots.

AB - Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH4 concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO2-patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO2 dots.

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