Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD

Jing sheng MA, Hiroshi Kawarada, Takao Yonehara, Jun ichi Suzuki, Jin Wei, Yoshihiro Yokota, Hirotaro Mori, Hiroshi Fujita, Akio Hiraki

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH4 concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO2-patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO2 dots.

Original languageEnglish
Pages (from-to)572-579
Number of pages8
JournalApplied Surface Science
Volume41-42
Issue numberC
DOIs
Publication statusPublished - 1989 Nov 2
Externally publishedYes

Fingerprint

Diamond
Chemical vapor deposition
Diamonds
diamonds
vapor deposition
Plasmas
polyhedrons
UHV power transmission
abrasives
Substrates
lamella
Abrasives
Powders
low concentrations
high voltages
Nucleation
Electron microscopes
electron microscopes
nucleation
Defects

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD. / MA, Jing sheng; Kawarada, Hiroshi; Yonehara, Takao; Suzuki, Jun ichi; Wei, Jin; Yokota, Yoshihiro; Mori, Hirotaro; Fujita, Hiroshi; Hiraki, Akio.

In: Applied Surface Science, Vol. 41-42, No. C, 02.11.1989, p. 572-579.

Research output: Contribution to journalArticle

MA, JS, Kawarada, H, Yonehara, T, Suzuki, JI, Wei, J, Yokota, Y, Mori, H, Fujita, H & Hiraki, A 1989, 'Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD' Applied Surface Science, vol. 41-42, no. C, pp. 572-579. https://doi.org/10.1016/0169-4332(89)90124-4
MA, Jing sheng ; Kawarada, Hiroshi ; Yonehara, Takao ; Suzuki, Jun ichi ; Wei, Jin ; Yokota, Yoshihiro ; Mori, Hirotaro ; Fujita, Hiroshi ; Hiraki, Akio. / Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD. In: Applied Surface Science. 1989 ; Vol. 41-42, No. C. pp. 572-579.
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