Abstract
Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH4 concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO2-patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO2 dots.
| Original language | English |
|---|---|
| Pages (from-to) | 572-579 |
| Number of pages | 8 |
| Journal | Applied Surface Science |
| Volume | 41-42 |
| Issue number | C |
| DOIs | |
| Publication status | Published - 1989 Nov 2 |
| Externally published | Yes |
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ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Surfaces, Coatings and Films
- Condensed Matter Physics
Cite this
Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD. / MA, Jing sheng; Kawarada, Hiroshi; Yonehara, Takao; Suzuki, Jun ichi; Wei, Jin; Yokota, Yoshihiro; Mori, Hirotaro; Fujita, Hiroshi; Hiraki, Akio.
In: Applied Surface Science, Vol. 41-42, No. C, 02.11.1989, p. 572-579.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Interfacial structures and selective growth of diamond particles formed by plasma-assisted CVD
AU - MA, Jing sheng
AU - Kawarada, Hiroshi
AU - Yonehara, Takao
AU - Suzuki, Jun ichi
AU - Wei, Jin
AU - Yokota, Yoshihiro
AU - Mori, Hirotaro
AU - Fujita, Hiroshi
AU - Hiraki, Akio
PY - 1989/11/2
Y1 - 1989/11/2
N2 - Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH4 concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO2-patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO2 dots.
AB - Internal and interfacial observations of diamond particles formed by plasma-assisted CVD have been carried out using an ultra-high-voltage transmission electron microscope from especially cross-sectional view. Diamond particles deposited at lower CH4 concentrations are faceted polyhedra, and line defects composed of micro-twin lamellae are found to emerge from the base center area, indicating that diamond nucleates at a site, then grows to form the polyhedron. Based on these observations, a nucleation control study has been carried out. SiO2-patterned Si substrate is firstly roughened by abrasive powders, then irradiated by an Ar beam at a certain angle. After deposition on this substrate using plasma-assisted CVD, diamond particles have been selectively grown on particular positions on the SiO2 dots.
UR - http://www.scopus.com/inward/record.url?scp=3643075167&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=3643075167&partnerID=8YFLogxK
U2 - 10.1016/0169-4332(89)90124-4
DO - 10.1016/0169-4332(89)90124-4
M3 - Article
AN - SCOPUS:3643075167
VL - 41-42
SP - 572
EP - 579
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
IS - C
ER -