Intermixing of InP-based quantum dots and application to micro-ring resonator wavelength-selective filter for photonic integrated devices

Atsushi Matsumoto, Asuka Matsushita, Yuki Takei, Kouichi Akahane, Yuichi Matsushima, Hiroshi Ishikawa, Katsuyuki Utaka

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    12 Citations (Scopus)

    Abstract

    In this study, we investigated quantum dot intermixing (QDI) for InAs/InGaAlAs highly stacked QDs on an InP(311)B substrate with low-temperature annealing at 650 °C in order to realize integrated photonic devices with QDs and passive waveguides. In particular, we adopted the method of introducing point defects by ICP-RIE to realize a blue shift of the PL peak wavelength by about 150 nm. Moreover, we successfully fabricated double micro-ring resonators by QDI. The output power contrasts of the devices were found to be 9.0 and 8.6 dB for TE and TM modes, respectively.

    Original languageEnglish
    Article number092801
    JournalApplied Physics Express
    Volume7
    Issue number9
    DOIs
    Publication statusPublished - 2014 Sep 1

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    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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