Internal microstructure and formation mechanism of surface protrusions in Pb-Ti-Nb-O thin films prepared by MOCVD

X. D. Liu, H. Funakubo, Suguru Noda, H. Komiyama

Research output: Contribution to journalArticle

Abstract

Pb-Ti-Nb-O ferroelectric thin films with various Nb additions are grown on a Pt/Ti/SiO2/Si substrate at 400°C by metal-organic (MO) CVD. A high density of dome-like surface protrusions is observed by scanning electron microscopy (SEM) in all the as-prepared films. Both the shape and the size of the surface defects are found to be Nb-content-dependent. The internal microstructure of the protrusions is further characterized by cross-section transmission electron microscopy (XTEM). The origins of these surface defects are discussed, based on the substrate hillock as well as the crystallization behaviour of the film forming precursors during MOCVD. The development of the observed surface defects is modeled using a two-dimensional vector analysis.

Original languageEnglish
Pages (from-to)253-259
Number of pages7
JournalAdvanced Materials
Volume13
Issue number21
Publication statusPublished - 2001 Nov 2
Externally publishedYes

Fingerprint

Surface defects
Metallorganic chemical vapor deposition
Thin films
Microstructure
Ferroelectric thin films
Domes
Substrates
Crystallization
Chemical vapor deposition
Metals
Transmission electron microscopy
Scanning electron microscopy

Keywords

  • Formation mechanisms
  • Lead
  • MOCVD
  • Modelling
  • Niobium
  • Titanium
  • Two-dimensional vector analysis

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Internal microstructure and formation mechanism of surface protrusions in Pb-Ti-Nb-O thin films prepared by MOCVD. / Liu, X. D.; Funakubo, H.; Noda, Suguru; Komiyama, H.

In: Advanced Materials, Vol. 13, No. 21, 02.11.2001, p. 253-259.

Research output: Contribution to journalArticle

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