INTERPRETATION OF QUANTITATIVE ANALYSIS OF ARTHUR AND LePORE FOR AlxGa1 - xAs USING AES.

S. Ichimura, M. Aratama, R. Shimizu

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A Monte Carlo simulation approach was applied for an interpretation of quantitative analysis using AES. The theoretical calculation has revealed that the shape of the energy distributions of backscattered electrons hardly changes as concentration (x) of Al//xGa//1// minus //xAs changes from x equals 0 to 1 and this leads to the linearity observed by J. R. Arthur and J. J. LePore.

Original languageEnglish
Pages (from-to)34-36
Number of pages3
JournalJournal of vacuum science & technology
Volume18
Issue number1
DOIs
Publication statusPublished - 1981 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)

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