Investigation of growth processes in flow-rate modulation epitaxy and atomic layer epitaxy by new in-situ optical monitoring method

Naoki Kobayashi, Toshiki Makimoto, Yoshiharu Yamauchi, Yoshiji Horikoshi

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Investigation of growth processes in flow-rate modulation epitaxy and atomic layer epitaxy by new in-situ optical monitoring method'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds