Investigation of oxygen vacancies in micro-patterned PZT thin films using Raman spectroscopy

Ken Nishida, Minoru Osada, Shintaro Yokoyama, Takafumi Kamo, Fujisawa Takashi, Keisuke Saito, Hiroshi Funakubo, Takashi Katoda, Takashi Yamamoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micro-patterned Pb(Zr,Ti)O3 (PZT) films with dot-pattern were grown by metal organic chemical vapor phase deposition (MOCVD). Micro-patterned Pb(Zr,Ti)O3 (PZT) films were formed on dot-patterned SrRuO 3 (SRO) buffer layer that was prepared by MOCVD through the metal mask on (111)Pt/Ti/SiO2/Si substrate. The orientation of dot-patterned PZT films was ascertained by the micro-beam x-ray diffraction (XRD) and their crystallinity was characterized by Raman spectroscopy. It was found that PZT films were oriented to (111) on dot-pattern, while (100)/(001) out of dot-pattern and the amount of oxygen vacancies at the circumference of the dot-pattern were larger than that of center of dot-pattern.

Original languageEnglish
Title of host publicationKey Engineering Materials
Pages135-138
Number of pages4
Volume421-422
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event6th Asian Meeting on Electroceramics, AMEC-6, in conjunction with the Electronics Division Meeting of the Ceramic Society of Japan - Tsukuba, Japan
Duration: 2008 Oct 222008 Oct 24

Publication series

NameKey Engineering Materials
Volume421-422
ISSN (Print)10139826

Other

Other6th Asian Meeting on Electroceramics, AMEC-6, in conjunction with the Electronics Division Meeting of the Ceramic Society of Japan
CountryJapan
CityTsukuba
Period08/10/2208/10/24

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Keywords

  • Micro-patterned Pb(Zr,Ti)O films
  • Oxygen vacancy
  • Raman spectroscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Nishida, K., Osada, M., Yokoyama, S., Kamo, T., Takashi, F., Saito, K., Funakubo, H., Katoda, T., & Yamamoto, T. (2010). Investigation of oxygen vacancies in micro-patterned PZT thin films using Raman spectroscopy. In Key Engineering Materials (Vol. 421-422, pp. 135-138). (Key Engineering Materials; Vol. 421-422). https://doi.org/10.4028/www.scientific.net/KEM.421-422.135