Investigation of oxygen vacancies in micro-patterned PZT thin films using Raman spectroscopy

Ken Nishida, Minoru Osada, Shintaro Yokoyama, Takafumi Kamo, Fujisawa Takashi, Keisuke Saito, Hiroshi Funakubo, Takashi Katoda, Takashi Yamamoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micro-patterned Pb(Zr,Ti)O3 (PZT) films with dot-pattern were grown by metal organic chemical vapor phase deposition (MOCVD). Micro-patterned Pb(Zr,Ti)O3 (PZT) films were formed on dot-patterned SrRuO 3 (SRO) buffer layer that was prepared by MOCVD through the metal mask on (111)Pt/Ti/SiO2/Si substrate. The orientation of dot-patterned PZT films was ascertained by the micro-beam x-ray diffraction (XRD) and their crystallinity was characterized by Raman spectroscopy. It was found that PZT films were oriented to (111) on dot-pattern, while (100)/(001) out of dot-pattern and the amount of oxygen vacancies at the circumference of the dot-pattern were larger than that of center of dot-pattern.

Original languageEnglish
Title of host publicationKey Engineering Materials
Pages135-138
Number of pages4
Volume421-422
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event6th Asian Meeting on Electroceramics, AMEC-6, in conjunction with the Electronics Division Meeting of the Ceramic Society of Japan - Tsukuba, Japan
Duration: 2008 Oct 222008 Oct 24

Publication series

NameKey Engineering Materials
Volume421-422
ISSN (Print)10139826

Other

Other6th Asian Meeting on Electroceramics, AMEC-6, in conjunction with the Electronics Division Meeting of the Ceramic Society of Japan
CountryJapan
CityTsukuba
Period08/10/2208/10/24

Fingerprint

Oxygen vacancies
Raman spectroscopy
Organic Chemicals
Thin films
Metals
Organic chemicals
Vapors
Buffer layers
Masks
Diffraction
X rays
Substrates

Keywords

  • Micro-patterned Pb(Zr,Ti)O films
  • Oxygen vacancy
  • Raman spectroscopy

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Nishida, K., Osada, M., Yokoyama, S., Kamo, T., Takashi, F., Saito, K., ... Yamamoto, T. (2010). Investigation of oxygen vacancies in micro-patterned PZT thin films using Raman spectroscopy. In Key Engineering Materials (Vol. 421-422, pp. 135-138). (Key Engineering Materials; Vol. 421-422). https://doi.org/10.4028/www.scientific.net/KEM.421-422.135

Investigation of oxygen vacancies in micro-patterned PZT thin films using Raman spectroscopy. / Nishida, Ken; Osada, Minoru; Yokoyama, Shintaro; Kamo, Takafumi; Takashi, Fujisawa; Saito, Keisuke; Funakubo, Hiroshi; Katoda, Takashi; Yamamoto, Takashi.

Key Engineering Materials. Vol. 421-422 2010. p. 135-138 (Key Engineering Materials; Vol. 421-422).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nishida, K, Osada, M, Yokoyama, S, Kamo, T, Takashi, F, Saito, K, Funakubo, H, Katoda, T & Yamamoto, T 2010, Investigation of oxygen vacancies in micro-patterned PZT thin films using Raman spectroscopy. in Key Engineering Materials. vol. 421-422, Key Engineering Materials, vol. 421-422, pp. 135-138, 6th Asian Meeting on Electroceramics, AMEC-6, in conjunction with the Electronics Division Meeting of the Ceramic Society of Japan, Tsukuba, Japan, 08/10/22. https://doi.org/10.4028/www.scientific.net/KEM.421-422.135
Nishida K, Osada M, Yokoyama S, Kamo T, Takashi F, Saito K et al. Investigation of oxygen vacancies in micro-patterned PZT thin films using Raman spectroscopy. In Key Engineering Materials. Vol. 421-422. 2010. p. 135-138. (Key Engineering Materials). https://doi.org/10.4028/www.scientific.net/KEM.421-422.135
Nishida, Ken ; Osada, Minoru ; Yokoyama, Shintaro ; Kamo, Takafumi ; Takashi, Fujisawa ; Saito, Keisuke ; Funakubo, Hiroshi ; Katoda, Takashi ; Yamamoto, Takashi. / Investigation of oxygen vacancies in micro-patterned PZT thin films using Raman spectroscopy. Key Engineering Materials. Vol. 421-422 2010. pp. 135-138 (Key Engineering Materials).
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