TY - GEN
T1 - Investigation of PD-CU-SI metallic glass film for hysterisis-free and fast response capacitive mems hydrogen sensors
AU - Hayashi, Yumi
AU - Yamazaki, Hiroaki
AU - Ono, Daiki
AU - Masunishi, Kei
AU - Ikehashi, Tamio
N1 - Funding Information:
The authors would like to thank Hideki Shibata and Yoshiaki Sugizaki for continuous supports and encouragements. A part of this study was supported by NIMS Nanofabrication Platform in Nanotechnology Platform Project sponsored by the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan.
Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/26
Y1 - 2017/7/26
N2 - We show that PdCuSi metallic glass (MG) is a promising material for Pd-based capacitive MEMS hydrogen sensors, reducing both hysteresis and response time of the sensing operation. Firstly, we demonstrate that the fabricated PdCuSi MG film exhibits no hysteresis during hydrogen absorption and desorption. Drastic reduction of the response time is also shown. We also show that, to eliminate the hysteresis and to reduce the response time, PuCuSi needs to be MG, not microcrystal. Secondly, based on the measured strain property, we show that the capacitive sensing scheme has advantage in sensing low concentration hydrogens.
AB - We show that PdCuSi metallic glass (MG) is a promising material for Pd-based capacitive MEMS hydrogen sensors, reducing both hysteresis and response time of the sensing operation. Firstly, we demonstrate that the fabricated PdCuSi MG film exhibits no hysteresis during hydrogen absorption and desorption. Drastic reduction of the response time is also shown. We also show that, to eliminate the hysteresis and to reduce the response time, PuCuSi needs to be MG, not microcrystal. Secondly, based on the measured strain property, we show that the capacitive sensing scheme has advantage in sensing low concentration hydrogens.
KW - Hydrogen sensor
KW - MEMS
KW - Metallic glass
KW - PdCuSi
KW - Strain
UR - http://www.scopus.com/inward/record.url?scp=85029356986&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85029356986&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2017.7994051
DO - 10.1109/TRANSDUCERS.2017.7994051
M3 - Conference contribution
AN - SCOPUS:85029356986
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 311
EP - 314
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -