Abstract
We show that PdCuSi metallic glass (MG) is a promising material for Pd-based capacitive MEMS hydrogen sensors, reducing both hysteresis and response time of the sensing operation. Firstly, we demonstrate that the fabricated PdCuSi MG film exhibits no hysteresis during hydrogen absorption and desorption. Drastic reduction of the response time is also shown. We also show that, to eliminate the hysteresis and to reduce the response time, PuCuSi needs to be MG, not microcrystal. Secondly, based on the measured strain property, we show that the capacitive sensing scheme has advantage in sensing low concentration hydrogens.
| Original language | English |
|---|---|
| Title of host publication | TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 311-314 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781538627310 |
| DOIs | |
| Publication status | Published - 2017 Jul 26 |
| Externally published | Yes |
| Event | 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China Duration: 2017 Jun 18 → 2017 Jun 22 |
Publication series
| Name | TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems |
|---|
Other
| Other | 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 |
|---|---|
| Country | Taiwan, Province of China |
| City | Kaohsiung |
| Period | 17/6/18 → 17/6/22 |
Fingerprint
Keywords
- Hydrogen sensor
- MEMS
- Metallic glass
- PdCuSi
- Strain
ASJC Scopus subject areas
- Chemical Health and Safety
- Instrumentation
- Electrical and Electronic Engineering
Cite this
Investigation of PD-CU-SI metallic glass film for hysterisis-free and fast response capacitive mems hydrogen sensors. / Hayashi, Yumi; Yamazaki, Hiroaki; Ono, Daiki; Masunishi, Kei; Ikehashi, Tamio.
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 311-314 7994051 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Investigation of PD-CU-SI metallic glass film for hysterisis-free and fast response capacitive mems hydrogen sensors
AU - Hayashi, Yumi
AU - Yamazaki, Hiroaki
AU - Ono, Daiki
AU - Masunishi, Kei
AU - Ikehashi, Tamio
PY - 2017/7/26
Y1 - 2017/7/26
N2 - We show that PdCuSi metallic glass (MG) is a promising material for Pd-based capacitive MEMS hydrogen sensors, reducing both hysteresis and response time of the sensing operation. Firstly, we demonstrate that the fabricated PdCuSi MG film exhibits no hysteresis during hydrogen absorption and desorption. Drastic reduction of the response time is also shown. We also show that, to eliminate the hysteresis and to reduce the response time, PuCuSi needs to be MG, not microcrystal. Secondly, based on the measured strain property, we show that the capacitive sensing scheme has advantage in sensing low concentration hydrogens.
AB - We show that PdCuSi metallic glass (MG) is a promising material for Pd-based capacitive MEMS hydrogen sensors, reducing both hysteresis and response time of the sensing operation. Firstly, we demonstrate that the fabricated PdCuSi MG film exhibits no hysteresis during hydrogen absorption and desorption. Drastic reduction of the response time is also shown. We also show that, to eliminate the hysteresis and to reduce the response time, PuCuSi needs to be MG, not microcrystal. Secondly, based on the measured strain property, we show that the capacitive sensing scheme has advantage in sensing low concentration hydrogens.
KW - Hydrogen sensor
KW - MEMS
KW - Metallic glass
KW - PdCuSi
KW - Strain
UR - http://www.scopus.com/inward/record.url?scp=85029356986&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85029356986&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2017.7994051
DO - 10.1109/TRANSDUCERS.2017.7994051
M3 - Conference contribution
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 311
EP - 314
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
ER -