Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors

Yumi Hayashi, Hiroaki Yamazaki, Daiki Ono, Kei Masunishi, Tamio Ikehashi

Research output: Contribution to journalArticle

6 Citations (Scopus)


In this study, we investigated PdCuSi metallic glass (MG) as a sensing material for capacitive MEMS hydrogen sensors. We first confirmed by film analysis that the fabricated PdCuSi film was MG and that it had a trigonal prism cluster. The measured pressure-composition-temperature curve of PdCuSi MG exhibited no hysteresis during hydrogen absorption and desorption. The response time was found to become faster by two orders of magnitudes compared with that of Pd polycrystal. These properties were attributed to the trigonal prism clusters. Strain was evaluated in the low hydrogen concentration regime of 0.05 vol% to 4.0 vol%, and the strain of PdCuSi MG was found to follow Sieverts' law well, indicating that hydrogen is present in the MG in a diffuse state. The hydrogen-concentration dependence of a capacitive MEMS hydrogen sensor was measured and hysteresis-free characteristics were obtained, implying advantages in hydrogen leak detection applications.

Original languageEnglish
Pages (from-to)9438-9445
Number of pages8
JournalInternational Journal of Hydrogen Energy
Issue number19
Publication statusPublished - 2018 May 10
Externally publishedYes



  • Hydrogen sensor
  • MEMS
  • Metallic glass
  • PdCuSi
  • Strain

ASJC Scopus subject areas

  • Renewable Energy, Sustainability and the Environment
  • Fuel Technology
  • Condensed Matter Physics
  • Energy Engineering and Power Technology

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