Investigation on the hardness and morphology of Be-Cu for probing Al layers

M. Saito, G. Kimoto, T. Homma

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this study, we evaluate the hardness and morphology of Al layers, which are constructed using Al / Si and alumina / Al / Si. The depth of the hollow in the Al sample, which has native oxide, was measured as 0.5 μm using a Be-Cu probe under the applied force of 10 mN. The relationship between the applied force and the displacement can be explained by the Hertzian theory. In the case of alumina (20 nm, 50 nm) / Al / Si, the hollows were smaller than those predicted by the Hertzian theory. Cross-sectional observations revealed that the Al layer under alumina was deformed vertically and laterally. It was concluded that the breaking of alumina was induced by the deformation of Al.

Original languageEnglish
Title of host publicationNanotechnology (General) - 218th ECS Meeting
Number of pages8
Publication statusPublished - 2011 Dec 1
EventNanotechnology General Session - 218th ECS Meeting - Las Vegas, NV, United States
Duration: 2010 Oct 102010 Oct 15

Publication series

NameECS Transactions
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737


ConferenceNanotechnology General Session - 218th ECS Meeting
CountryUnited States
CityLas Vegas, NV

ASJC Scopus subject areas

  • Engineering(all)

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