Investigation on the hardness and morphology of Be-Cu for probing Al layers

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, we evaluate the hardness and morphology of Al layers, which are constructed using Al / Si and alumina / Al / Si. The depth of the hollow in the Al sample, which has native oxide, was measured as 0.5 μm using a Be-Cu probe under the applied force of 10 mN. The relationship between the applied force and the displacement can be explained by the Hertzian theory. In the case of alumina (20 nm, 50 nm) / Al / Si, the hollows were smaller than those predicted by the Hertzian theory. Cross-sectional observations revealed that the Al layer under alumina was deformed vertically and laterally. It was concluded that the breaking of alumina was induced by the deformation of Al.

Original languageEnglish
Title of host publicationECS Transactions
Pages65-72
Number of pages8
Volume33
Edition38
DOIs
Publication statusPublished - 2011
EventNanotechnology General Session - 218th ECS Meeting - Las Vegas, NV
Duration: 2010 Oct 102010 Oct 15

Other

OtherNanotechnology General Session - 218th ECS Meeting
CityLas Vegas, NV
Period10/10/1010/10/15

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Alumina
Hardness
Oxides

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Investigation on the hardness and morphology of Be-Cu for probing Al layers. / Saito, Mikiko; Kimoto, G.; Homma, Takayuki.

ECS Transactions. Vol. 33 38. ed. 2011. p. 65-72.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Saito, M, Kimoto, G & Homma, T 2011, Investigation on the hardness and morphology of Be-Cu for probing Al layers. in ECS Transactions. 38 edn, vol. 33, pp. 65-72, Nanotechnology General Session - 218th ECS Meeting, Las Vegas, NV, 10/10/10. https://doi.org/10.1149/1.3583515
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