Original language | English |
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Pages (from-to) | 45-50 |
Number of pages | 6 |
Journal | Shinku/Journal of the Vacuum Society of Japan |
Volume | 33 |
Issue number | 2 |
DOIs |
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Publication status | Published - 1990 |
Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering