Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences

Yukio Fujiwara; Kouji Kondou; Yoshikazu Teranishi; Hidehiko Nonaka; Naoaki Saito; Toshiyuki Fujimoto; Akira Kurokawa; Shingo Ichimura; Mitsuhiro Tomita

doi:10.1016/j.nimb.2007.01.052

Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences

Yukio Fujiwara, Kouji Kondou, Yoshikazu Teranishi, Hidehiko Nonaka, Naoaki Saito, Toshiyuki Fujimoto, Akira Kurokawa, Shingo Ichimura, Mitsuhiro Tomita

Research output: Contribution to journal › Article

6 Citations (Scopus)

Abstract

Tetrairidium dodecacarbonyl, Ir₄(CO)₁₂, is a metal cluster complex which has a molecular weight of 1104.9. Using a metal-cluster-complex ion source, the interaction between Ir₄ (CO)_n⁺ ions (n = 0-12) and silicon substrates was studied at a beam energy ranging from 2 keV to 10 keV at normal incidence. By adjusting Wien-filter voltage, the influence of CO ligands was investigated. Experimental results showed that sputtering yield of silicon bombarded with Ir₄ (CO)_n⁺ ions at 10 keV decreased with the number of CO ligands. In the case of 2 keV, deposition tended to be suppressed by removing CO ligands from the impinging cluster ions. The influence of CO ligands was explained by considering changes in surface properties caused by the irradiation of Ir₄ (CO)_n⁺ ions. It was also found that the bombardment with Ir₄ (CO)₇⁺ions at 2.5 keV caused deposition on silicon target.

Original language	English
Pages (from-to)	653-657
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	257
Issue number	1-2 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.nimb.2007.01.052
Publication status	Published - 2007 Apr 1
Externally published	Yes

Keywords

Deposition
Ion beam
Ir(CO)
Metal cluster complex
Sputtering

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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Fujiwara, Y., Kondou, K., Teranishi, Y., Nonaka, H., Saito, N., Fujimoto, T., Kurokawa, A., Ichimura, S., & Tomita, M. (2007). Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 257(1-2 SPEC. ISS.), 653-657. https://doi.org/10.1016/j.nimb.2007.01.052

Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences. / Fujiwara, Yukio; Kondou, Kouji; Teranishi, Yoshikazu; Nonaka, Hidehiko; Saito, Naoaki; Fujimoto, Toshiyuki; Kurokawa, Akira; Ichimura, Shingo; Tomita, Mitsuhiro.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 257, No. 1-2 SPEC. ISS., 01.04.2007, p. 653-657.

Research output: Contribution to journal › Article

Fujiwara, Y, Kondou, K, Teranishi, Y, Nonaka, H, Saito, N, Fujimoto, T, Kurokawa, A, Ichimura, S & Tomita, M 2007, 'Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 257, no. 1-2 SPEC. ISS., pp. 653-657. https://doi.org/10.1016/j.nimb.2007.01.052

Fujiwara Y, Kondou K, Teranishi Y, Nonaka H, Saito N, Fujimoto T et al. Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2007 Apr 1;257(1-2 SPEC. ISS.):653-657. https://doi.org/10.1016/j.nimb.2007.01.052

Fujiwara, Yukio ; Kondou, Kouji ; Teranishi, Yoshikazu ; Nonaka, Hidehiko ; Saito, Naoaki ; Fujimoto, Toshiyuki ; Kurokawa, Akira ; Ichimura, Shingo ; Tomita, Mitsuhiro. / Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2007 ; Vol. 257, No. 1-2 SPEC. ISS. pp. 653-657.

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title = "Irradiation characteristics of metal-cluster-complex ions containing diverse multi-elements with large mass differences",

abstract = "Tetrairidium dodecacarbonyl, Ir4(CO)12, is a metal cluster complex which has a molecular weight of 1104.9. Using a metal-cluster-complex ion source, the interaction between Ir4 (CO)n+ ions (n = 0-12) and silicon substrates was studied at a beam energy ranging from 2 keV to 10 keV at normal incidence. By adjusting Wien-filter voltage, the influence of CO ligands was investigated. Experimental results showed that sputtering yield of silicon bombarded with Ir4 (CO)n+ ions at 10 keV decreased with the number of CO ligands. In the case of 2 keV, deposition tended to be suppressed by removing CO ligands from the impinging cluster ions. The influence of CO ligands was explained by considering changes in surface properties caused by the irradiation of Ir4 (CO)n+ ions. It was also found that the bombardment with Ir4 (CO)7+ions at 2.5 keV caused deposition on silicon target.",

keywords = "Deposition, Ion beam, Ir(CO), Metal cluster complex, Sputtering",

author = "Yukio Fujiwara and Kouji Kondou and Yoshikazu Teranishi and Hidehiko Nonaka and Naoaki Saito and Toshiyuki Fujimoto and Akira Kurokawa and Shingo Ichimura and Mitsuhiro Tomita",

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AU - Kondou, Kouji

AU - Teranishi, Yoshikazu

AU - Nonaka, Hidehiko

AU - Saito, Naoaki

AU - Fujimoto, Toshiyuki

AU - Kurokawa, Akira

AU - Ichimura, Shingo

AU - Tomita, Mitsuhiro

PY - 2007/4/1

Y1 - 2007/4/1

N2 - Tetrairidium dodecacarbonyl, Ir4(CO)12, is a metal cluster complex which has a molecular weight of 1104.9. Using a metal-cluster-complex ion source, the interaction between Ir4 (CO)n+ ions (n = 0-12) and silicon substrates was studied at a beam energy ranging from 2 keV to 10 keV at normal incidence. By adjusting Wien-filter voltage, the influence of CO ligands was investigated. Experimental results showed that sputtering yield of silicon bombarded with Ir4 (CO)n+ ions at 10 keV decreased with the number of CO ligands. In the case of 2 keV, deposition tended to be suppressed by removing CO ligands from the impinging cluster ions. The influence of CO ligands was explained by considering changes in surface properties caused by the irradiation of Ir4 (CO)n+ ions. It was also found that the bombardment with Ir4 (CO)7+ions at 2.5 keV caused deposition on silicon target.

AB - Tetrairidium dodecacarbonyl, Ir4(CO)12, is a metal cluster complex which has a molecular weight of 1104.9. Using a metal-cluster-complex ion source, the interaction between Ir4 (CO)n+ ions (n = 0-12) and silicon substrates was studied at a beam energy ranging from 2 keV to 10 keV at normal incidence. By adjusting Wien-filter voltage, the influence of CO ligands was investigated. Experimental results showed that sputtering yield of silicon bombarded with Ir4 (CO)n+ ions at 10 keV decreased with the number of CO ligands. In the case of 2 keV, deposition tended to be suppressed by removing CO ligands from the impinging cluster ions. The influence of CO ligands was explained by considering changes in surface properties caused by the irradiation of Ir4 (CO)n+ ions. It was also found that the bombardment with Ir4 (CO)7+ions at 2.5 keV caused deposition on silicon target.

KW - Deposition

KW - Ion beam

KW - Ir(CO)

KW - Metal cluster complex

KW - Sputtering

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