A new simple method of exposing the lambda /4-phase-shifted corrugation for DFB-LD was successfully developed. It was achieved by using an original spatial phase modulating mask. The mask fabrication process was developed by selective deposition of SiO//2 thick film on a quartz substrate.
|Title of host publication||Unknown Host Publication Title|
|Place of Publication||Genoa, Italy|
|Publisher||Istituto Int delle Comunicazioni|
|Number of pages||4|
|Publication status||Published - 1985|
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