Lanthanum-modified lead zirconate titanate electro-optic modulators fabricated using aerosol deposition for LSI interconnects

Masafumi Nakada, Takanori Shimizu, Hiroshi Miyazaki, Hiroki Tsuda, Jun Akedo, Keishi Ohashi

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We developed lanthanum-modified lead zirconate titanate (PLZT), electro-optic modulators using aerosol deposition (AD). AD of complex oxide films on Si substrates is achievable, leading to the possible integration of these modulators into semiconductor integrated circuits. Polarization was measured in PLZT optical waveguides that were 1.8μm in width, and ferroelectric hysteresis loops were observed. Mach- Zehnder interferometer (MZI) PLZT modulators were demonstrated with 500-μm-length electrodes, and the insertion loss of the MZI modulators changed with applied electric field. Their change in insertion loss exhibited hysteresis loops, which were comparable to their ferroelectric ones. We obtained a 2-GHz optical output signal with a relevant bias voltage.

Original languageEnglish
JournalJapanese Journal of Applied Physics
Volume48
Issue number9 Part 2
DOIs
Publication statusPublished - 2009
Externally publishedYes

Fingerprint

large scale integration
Lanthanum
Electrooptical effects
lanthanum
Modulators
electro-optics
Aerosols
modulators
aerosols
Mach-Zehnder interferometers
Hysteresis loops
Insertion losses
insertion loss
Ferroelectric materials
hysteresis
Optical waveguides
Bias voltage
optical waveguides
Oxide films
integrated circuits

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Lanthanum-modified lead zirconate titanate electro-optic modulators fabricated using aerosol deposition for LSI interconnects. / Nakada, Masafumi; Shimizu, Takanori; Miyazaki, Hiroshi; Tsuda, Hiroki; Akedo, Jun; Ohashi, Keishi.

In: Japanese Journal of Applied Physics, Vol. 48, No. 9 Part 2, 2009.

Research output: Contribution to journalArticle

Nakada, Masafumi ; Shimizu, Takanori ; Miyazaki, Hiroshi ; Tsuda, Hiroki ; Akedo, Jun ; Ohashi, Keishi. / Lanthanum-modified lead zirconate titanate electro-optic modulators fabricated using aerosol deposition for LSI interconnects. In: Japanese Journal of Applied Physics. 2009 ; Vol. 48, No. 9 Part 2.
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