LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON BEAM IN THE STORAGE RING.

Hiroshi Tanino, Koichiro Hoh, Masahiro Hirata, Shingo Ichimura, Nobufumi Atoda, Takio Tomimasu, Tsutomu Noguchi, Suguru Sugiyama, Tetsuo Yamazaki

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

It is demonstrated that the vertical (normal to the plane of electron orbit) width of exposed region in synchrotron radiation lithography can be expanded by a factor of more than three by steering the electron beam in the storage ring with a horizontal magnetic field, without losing intensity and homogeneity. The vertical distribution of the developed thickness in the resist and its vertical shift with the steering magnetic field are evaluated. The perturbation in the electron orbit is also estimated from the shifts of soft X-rays and visible illuminated regions.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume22
Issue number11
Publication statusPublished - 1983 Jan 1
Externally publishedYes

Fingerprint

Storage rings
Synchrotron radiation
Lithography
Electron beams
synchrotron radiation
Orbits
lithography
electron beams
Magnetic fields
orbits
vertical distribution
Electrons
shift
magnetic fields
homogeneity
electrons
X rays
perturbation
x rays

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)

Cite this

LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON BEAM IN THE STORAGE RING. / Tanino, Hiroshi; Hoh, Koichiro; Hirata, Masahiro; Ichimura, Shingo; Atoda, Nobufumi; Tomimasu, Takio; Noguchi, Tsutomu; Sugiyama, Suguru; Yamazaki, Tetsuo.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 22, No. 11, 01.01.1983.

Research output: Contribution to journalArticle

Tanino, Hiroshi ; Hoh, Koichiro ; Hirata, Masahiro ; Ichimura, Shingo ; Atoda, Nobufumi ; Tomimasu, Takio ; Noguchi, Tsutomu ; Sugiyama, Suguru ; Yamazaki, Tetsuo. / LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON BEAM IN THE STORAGE RING. In: Japanese Journal of Applied Physics, Part 2: Letters. 1983 ; Vol. 22, No. 11.
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