LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON ORBIT IN THE STORAGE RING.

Hiroshi Tanino, Koichiro Hoh, Masahiro Hirata, Shirigo Ichimura, Nobufumi Atoda, Takio Tomimiasu, Tsutomu Noguchi, Suguru Sugiyama, Tetsuo Yamazaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationConference on Solid State Devices and Materials
PublisherBusiness Cent for Academic Soc Japan
Pages30-31
Number of pages2
ISBN (Print)4930813042
Publication statusPublished - 1983
Externally publishedYes

Publication series

NameConference on Solid State Devices and Materials

ASJC Scopus subject areas

  • Engineering(all)

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