LARGE AREA EXPOSURE IN SYNCHROTRON RADIATION LITHOGRAPHY UTILIZING THE STEERING OF THE ELECTRON BEAM IN THE STORAGE RING.

Hiroshi Tanino*, Koichiro Hoh, Masahiro Hirata, Shingo Ichimura, Nobufumi Atoda, Takio Tomimasu, Tsutomu Noguchi, Suguru Sugiyama, Tetsuo Yamazaki

*Corresponding author for this work

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