Large-area growth of in-plane oriented (112̄0) ZnO films by linear cathode magnetron sputtering

Takayuki Kawamoto, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe, Yoshikazu Mori, Sho Sasaki, Masatoshi Oba

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Fingerprint Dive into the research topics of 'Large-area growth of in-plane oriented (112̄0) ZnO films by linear cathode magnetron sputtering'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy