Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

Tomoaki Ohira, Tetsuro Segawa, Kenji Nagai, Katsuyuki Utaka, Masashi Nakao

    Research output: Contribution to journalArticle

    15 Citations (Scopus)

    Abstract

    We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.

    Original languageEnglish
    Pages (from-to)1085-1089
    Number of pages5
    JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
    Volume41
    Issue number2 B
    Publication statusPublished - 2002 Feb

    Fingerprint

    Periodic structures
    Holography
    holography
    reflectance
    Dry etching
    Wet etching
    Lasers
    Substrates
    lasers
    etching

    Keywords

    • Laser holography
    • Milling
    • Photonic crystal
    • Sub-wavelength structure
    • Wet etching

    ASJC Scopus subject areas

    • Physics and Astronomy (miscellaneous)

    Cite this

    Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography. / Ohira, Tomoaki; Segawa, Tetsuro; Nagai, Kenji; Utaka, Katsuyuki; Nakao, Masashi.

    In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 41, No. 2 B, 02.2002, p. 1085-1089.

    Research output: Contribution to journalArticle

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    AU - Nakao, Masashi

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