Large area InP submicron two-dimensional (2D) periodic structures fabricated by two-time laser holography

Tomoaki Ohira, Tetsuro Segawa, Kenji Nagai, Katsuyuki Utaka, Masashi Nakao

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

We fabricated submicron two-dimensional (2D) periodic structures on (100)-InP substrates by two-time He-Cd laser holography, and subsequent dry and wet etchings. Triangular and square lattice patterns with periods of 300 nm-500 nm were successfully fabricated over large areas of the substrates. We measured the reflectance of the samples to observe reflectance reduction phenomena inherent to the submicron 2D periodic structures.

Original languageEnglish
Pages (from-to)1085-1089
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume41
Issue number2 B
Publication statusPublished - 2002 Feb 1

Keywords

  • Laser holography
  • Milling
  • Photonic crystal
  • Sub-wavelength structure
  • Wet etching

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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