The use of Low-power microwave plasma-assisted chemical vapor deposition (CVD) for the large-areas synthesis of Carbon Nanotubes was investigated. The results show that at a small microwave power input of 60 W, large-area synthesis of carbon nanofibers can be achieved using remote deposition. The size limitation of the substrate heater caused a growth area increase factor of 25.
|Number of pages||4|
|Journal||Chemical Vapor Deposition|
|Publication status||Published - 2004 Jun 1|
ASJC Scopus subject areas
- Surfaces and Interfaces
- Process Chemistry and Technology