Large-area synthesis of carbon nanofibers by low-power microwave plasma-assisted CVD

Guofang Zhong; Minoru Tachiki; Hitoshi Umezawa; Toyokatsu Fujisaki; Hiroshi Kawarada; Iwao Ohdomari

doi:10.1002/cvde.200304168

Large-area synthesis of carbon nanofibers by low-power microwave plasma-assisted CVD

Guofang Zhong^*, Minoru Tachiki, Hitoshi Umezawa, Toyokatsu Fujisaki, Hiroshi Kawarada, Iwao Ohdomari

^*Corresponding author for this work

School of Fundamental Science and Engineering

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

The use of Low-power microwave plasma-assisted chemical vapor deposition (CVD) for the large-areas synthesis of Carbon Nanotubes was investigated. The results show that at a small microwave power input of 60 W, large-area synthesis of carbon nanofibers can be achieved using remote deposition. The size limitation of the substrate heater caused a growth area increase factor of 25.

Original language	English
Pages (from-to)	125-128
Number of pages	4
Journal	Chemical Vapor Deposition
Volume	10
Issue number	3
DOIs	https://doi.org/10.1002/cvde.200304168
Publication status	Published - 2004 Jun 1

ASJC Scopus subject areas

Chemistry(all)
Surfaces and Interfaces
Process Chemistry and Technology

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abstract = "The use of Low-power microwave plasma-assisted chemical vapor deposition (CVD) for the large-areas synthesis of Carbon Nanotubes was investigated. The results show that at a small microwave power input of 60 W, large-area synthesis of carbon nanofibers can be achieved using remote deposition. The size limitation of the substrate heater caused a growth area increase factor of 25.",

author = "Guofang Zhong and Minoru Tachiki and Hitoshi Umezawa and Toyokatsu Fujisaki and Hiroshi Kawarada and Iwao Ohdomari",

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AU - Zhong, Guofang

AU - Tachiki, Minoru

AU - Umezawa, Hitoshi

AU - Fujisaki, Toyokatsu

AU - Kawarada, Hiroshi

AU - Ohdomari, Iwao

PY - 2004/6/1

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N2 - The use of Low-power microwave plasma-assisted chemical vapor deposition (CVD) for the large-areas synthesis of Carbon Nanotubes was investigated. The results show that at a small microwave power input of 60 W, large-area synthesis of carbon nanofibers can be achieved using remote deposition. The size limitation of the substrate heater caused a growth area increase factor of 25.

AB - The use of Low-power microwave plasma-assisted chemical vapor deposition (CVD) for the large-areas synthesis of Carbon Nanotubes was investigated. The results show that at a small microwave power input of 60 W, large-area synthesis of carbon nanofibers can be achieved using remote deposition. The size limitation of the substrate heater caused a growth area increase factor of 25.

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Large-area synthesis of carbon nanofibers by low-power microwave plasma-assisted CVD

Abstract

ASJC Scopus subject areas

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