Large-area synthesis of carbon nanofibers by low-power microwave plasma-assisted CVD

Guofang Zhong, Minoru Tachiki, Hitoshi Umezawa, Toyokatsu Fujisaki, Hiroshi Kawarada, Iwao Ohdomari

    Research output: Contribution to journalArticle

    19 Citations (Scopus)


    The use of Low-power microwave plasma-assisted chemical vapor deposition (CVD) for the large-areas synthesis of Carbon Nanotubes was investigated. The results show that at a small microwave power input of 60 W, large-area synthesis of carbon nanofibers can be achieved using remote deposition. The size limitation of the substrate heater caused a growth area increase factor of 25.

    Original languageEnglish
    Pages (from-to)125-128
    Number of pages4
    JournalChemical Vapor Deposition
    Issue number3
    Publication statusPublished - 2004 Jun


    ASJC Scopus subject areas

    • Electrochemistry
    • Process Chemistry and Technology
    • Surfaces, Coatings and Films
    • Surfaces and Interfaces
    • Condensed Matter Physics
    • Electronic, Optical and Magnetic Materials

    Cite this