Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE

S. Honda, Z. Wu, J. Matsui, Katsuyuki Utaka, T. Edura, M. Tokuda, K. Tsutsui, Y. Wada

    Research output: Contribution to journalArticle

    32 Citations (Scopus)

    Abstract

    A largely-tunable wideband Bragg grating on a silicon-on-insulator (SOI) rib waveguide loaded with Au/Cr heater is presented. A deep first-order Bragg grating with smooth etched side wall has been successfully etched by deep reactive-ion etching (deep-RIE). As a result, a wide bandwidth of about 4nm at -10dB transmission-level was obtained with a tuning range of about 18nm using the thermo-optic effect.

    Original languageEnglish
    Pages (from-to)630-631
    Number of pages2
    JournalElectronics Letters
    Volume43
    Issue number11
    DOIs
    Publication statusPublished - 2007

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    Bragg gratings
    Reactive ion etching
    Waveguides
    Silicon
    Optics
    Tuning
    Bandwidth

    ASJC Scopus subject areas

    • Electrical and Electronic Engineering

    Cite this

    Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE. / Honda, S.; Wu, Z.; Matsui, J.; Utaka, Katsuyuki; Edura, T.; Tokuda, M.; Tsutsui, K.; Wada, Y.

    In: Electronics Letters, Vol. 43, No. 11, 2007, p. 630-631.

    Research output: Contribution to journalArticle

    Honda, S, Wu, Z, Matsui, J, Utaka, K, Edura, T, Tokuda, M, Tsutsui, K & Wada, Y 2007, 'Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE', Electronics Letters, vol. 43, no. 11, pp. 630-631. https://doi.org/10.1049/el:20070884
    Honda, S. ; Wu, Z. ; Matsui, J. ; Utaka, Katsuyuki ; Edura, T. ; Tokuda, M. ; Tsutsui, K. ; Wada, Y. / Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE. In: Electronics Letters. 2007 ; Vol. 43, No. 11. pp. 630-631.
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    AU - Utaka, Katsuyuki

    AU - Edura, T.

    AU - Tokuda, M.

    AU - Tsutsui, K.

    AU - Wada, Y.

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