A largely-tunable wideband Bragg grating on a silicon-on-insulator (SOI) rib waveguide loaded with Au/Cr heater is presented. A deep first-order Bragg grating with smooth etched side wall has been successfully etched by deep reactive-ion etching (deep-RIE). As a result, a wide bandwidth of about 4nm at -10dB transmission-level was obtained with a tuning range of about 18nm using the thermo-optic effect.
ASJC Scopus subject areas
- Electrical and Electronic Engineering