Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE

S. Honda, Z. Wu, J. Matsui, K. Utaka, T. Edura, M. Tokuda, K. Tsutsui, Y. Wada

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Abstract

A largely-tunable wideband Bragg grating on a silicon-on-insulator (SOI) rib waveguide loaded with Au/Cr heater is presented. A deep first-order Bragg grating with smooth etched side wall has been successfully etched by deep reactive-ion etching (deep-RIE). As a result, a wide bandwidth of about 4nm at -10dB transmission-level was obtained with a tuning range of about 18nm using the thermo-optic effect.

Original languageEnglish
Pages (from-to)630-631
Number of pages2
JournalElectronics Letters
Volume43
Issue number11
DOIs
Publication statusPublished - 2007 May 28

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Honda, S., Wu, Z., Matsui, J., Utaka, K., Edura, T., Tokuda, M., Tsutsui, K., & Wada, Y. (2007). Largely-tunable wideband Bragg gratings fabricated on SOI rib waveguides employed by deep-RIE. Electronics Letters, 43(11), 630-631. https://doi.org/10.1049/el:20070884