Lattice Strain around Platelet Oxide Precipitates in C- And N-Doped Silicon Epitaxial Wafers

Mitsuharu Yonemura*, Koji Sueoka, Kazuhito Kamei

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Engineering & Materials Science

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Chemical Compounds