Light-transmitting two-dimensional photodetector array using a-Si pin photodiodes and poly-Si TFT's integrated on a transparent substrate

Masamichi Okamura, Kazuo Kimura, Seiiti Shirai, Noriyoshi Yamauchi

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

A light-transmitting two-dimensional photodetector array (32×32 cells) using amorphous silicon (a-Si) pin photodiodes and polysilicon (poly-Si) thin film transistors (TFT's) integrated on a transparent substrate has been developed for use in a free-space optical switching network. The fabrication and the characteristics of the photodetector array are discussed. With driving circuits and sensing amplifiers, this photodetector array shows a minimum detectable power of -25 dBm and an insertion loss of 0.4 dB for an incident optical beam with a diameter of 550 μm. By monitoring the positions and the states of input optical beams, this photodetector array can be used to control the optical paths in photonic switching systems, such as a 1024-input-port optical concentrator.

Original languageEnglish
Pages (from-to)180-185
Number of pages6
JournalIEEE Transactions on Electron Devices
Volume41
Issue number2
DOIs
Publication statusPublished - 1994 Feb
Externally publishedYes

Fingerprint

Thin film transistors
Photodetectors
Photodiodes
Amorphous silicon
Polysilicon
amorphous silicon
photodiodes
photometers
transistors
Substrates
optical switching
thin films
Switching systems
concentrators
Switching networks
Fiber optic networks
Insertion losses
optical paths
insertion loss
Photonics

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

Light-transmitting two-dimensional photodetector array using a-Si pin photodiodes and poly-Si TFT's integrated on a transparent substrate. / Okamura, Masamichi; Kimura, Kazuo; Shirai, Seiiti; Yamauchi, Noriyoshi.

In: IEEE Transactions on Electron Devices, Vol. 41, No. 2, 02.1994, p. 180-185.

Research output: Contribution to journalArticle

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